Study on the optical property and surface morphology of N doped TiO2 film deposited with different N2 flow rates by DCPMS
Honglin Liu
,
Tingting Yao
,
Wanyu Ding
,
Wanyu Ding
X
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Affiliations
- School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China;Liaoning Province Education Department Engineering Research Center of Optoelectronic Materials and Device, Dalian 116028, China;Key Laboratory of Materials Modification by Laser, Ion and Electron Beams, Dalian University of Technology, Ministry of Education, Dalian 116028, China
Hualin Wang
,
Hualin Wang
X
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Affiliations
- School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China;Liaoning Province Education Department Engineering Research Center of Optoelectronic Materials and Device, Dalian 116028, China
Dongying Ju
,
Weiping Chai
Weiping Chai
X
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Affiliations
- School of Materials Science and Engineering, Dalian Jiaotong University, Dalian 116028, China;Liaoning Province Education Department Engineering Research Center of Optoelectronic Materials and Device, Dalian 116028, China
DOI:
Received ,Revised , Accepted , Available online March 11, 2014
Volume ,2013,Pages S54-S58