| 聚焦离子束加工技术在元器件可靠性领域中的应用研究 |
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| 引用本文： | 崔帅,曹德峰,李志勇,陈斌.聚焦离子束加工技术在元器件可靠性领域中的应用研究[J].环境技术,2016(2):26-30. |
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| 作者姓名： | 崔帅 曹德峰 李志勇 陈斌 |
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| 作者单位： | 上海微小卫星工程中心，上海 201203; 中国科学院微小卫星重点实验室，上海 201203 |
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| 摘 要： | FIB技术通过截面加工实现部分失效样品的原位观察,通过截面加工获得的图像获取相关信息;能够进行TEM制样,是材料微分析领域中不可缺少的分析技术;能够进行纳米器件加工,是微加工领域的一种新型技术。FIB技术可操作性强、样品损伤小,对航天型号元器件可靠性质量保证技术具有一定的指导意义。
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| 关 键 词： | FIB 结构分析 失效分析 TEM制样 |
Application of Focused Ion Beam Processing Technology in Reliability Field |
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| Abstract: | By cross-section machining technique, partial failure components were observed using Focused Ion Beam, some of the relevant information was obtained. As an indispensable analytical technique, it can carry out micro-analysis of material, Transmission Electron Microscope sample preparation and fabricate nano-devices. As a new technology, it has little damage to the sample and be useful in micro-machining field. The reliability quality assurance technology of aerospace model components has some certain guiding significance. |
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| Keywords: | focused ion beam construct analysis failure analysis transmission electron microscope sample preparation |
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