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A study on recovery of SiC from silicon wafer cutting slurry |
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| Authors: | Lee Wei-Hao Hsu Chih-Wei Ding Yung-Chin Cheng Ta-Wui |
| Institution: | 1.Institute of Mineral Resources Engineering, National Taipei University of Technology, Taipei, Taiwan, Republic of China ;2.GlobalWafers Co., Ltd., Hsinchu, Taiwan, Republic of China ; |
| Abstract: | Journal of Material Cycles and Waste Management - The objective of this study is to recover SiC from silicon wafer cutting slurry using physical separation and acid/alkali purification processes.... |
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