中国集成电路制造行业VOCs排放特征及控制对策

中国电子信息产业发展迅速，集成电路等电子器件产量不断增加.在集成电路制造的过程中，大量有机溶剂的使用导致VOCs的产生和排放，从而对大气环境造成影响.为掌握集成电路制造行业VOCs的排放特征，系统分析了其工艺流程和产排污环节，分析了行业废气收集和治理现状，通过对典型企业VOCs的排放监测，获得VOCs排放水平；采用排放因子法核算行业VOCs历史排放量，并基于行业排放特征及减排潜力分析，提出了相应的污染防治对策.结果表明：在集成电路制造中，VOCs排放环节主要集中在光刻、清洗、去胶等过程，1 m²集成电路产量约使用87 g有机溶剂，VOCs产生量较大；通过采取高效的VOCs治理技术，集成电路制造行业有组织排放水平较低，平均浓度为2.1 mg·m^-3，但厂界无组织排放浓度相对较高，平均浓度为0.78 mg·m^-3，接近国家标准的排放限值.根据排放量核算结果，2011—2016年中国集成电路制造行业VOCs排放量呈逐年上升的趋势，主要受产量增加而相应污染控制技术水平提升有限的影响，无组织排放量比重大，占排放总量的38.1%~45.1%.

VOCs emission characteristics and control measures for integrated circuit manufacturing industry in China

Electronic information industry has been developed rapidly in China, the production of electronic devices such as integrated circuit (IC) is increasing. The use of a large amount of organic solvents in IC manufacturing industry leads to the generation and emission of VOCs, which affects the atmospheric environment. In order to determine the VOCs emission characteristic of IC manufacturing industry, the process flow, pollutants emission step, the current situation of flue gas collection and treatment of which are systematically analyzed in this study, understanding the organized VOCs emission level based on the monitoring for typical enterprises. The emission factor method is adopted to calculate the VOCs emission of IC manufacturing industry, the pollution prevention and control measures are proposed based on the emission characteristics and reduction potential analysis. The results show that:the VOCs emission process is mainly from lithography, cleaning and gluing process in IC manufacturing, about 87 g organic solvents are used for 1 m² of IC production. By adopting efficient VOCs purification system, the organized emission level of IC manufacturing industry is relatively low with an average concentration of 2.1 mg·m^-3, but the unorganized emission concentration at the factory boundary is relatively high with an average of 0.78 mg·m^-3, which is close to the emission limit of the implementation standard. VOCs emission from IC manufacturing industry in China have the upward trend from 2011 to 2016, which mainly affected by the increase of IC production and the limited improvement of VOCs remove efficiency. The ratio of unorganized emissions is significant, accounting for 38.1%~45.1% of total VOCs emissions. Combined with the VOCs emission characteristic of IC manufacturing industry, it is considered that there is still potential in reduction of organic solvents use and control of unorganized emissions.