三甲基氯硅烷及六甲基二硅氮烷水解产物分析方法研究

研究采用吹扫捕集-气相色谱-质谱法测定三甲基氯硅烷及六甲基二硅氮烷水解产物的分析方法。结果表明,两种物质遇水迅速水解,水解产物均为三甲基硅醇与六甲基二硅氧烷。以该方法测定六甲基二硅氧烷的检出限为0.02ng/ml,精密度为1.3%～10.6%,线性范围为0.05～60ng/ml。水解动力学研究结果表明,三甲基氯硅烷及六甲基二硅氮烷水解产物含量随时间减少而降低,强酸、强碱条件下测试未发现生成其他的水解产物。该方法可为同类污染物的应急测试提供参考。

Analysis of the Hydrolyzate of Trimethylchlorosilane and Hexamethyldisilazane

In this paper, the hydrolyzate of trimethylchlorosilane and hexamethyldisilazane was analysed by purge and trap -gas chromatography-mass spectrometry. The results show that the two pollutants was hydrolyzed into trimethylsilanol and hexamethyl-disiloxan in water. The detection limit of hexamethyl-disiloxan were 0.02ng/ml. The standard deviation of 1.3%to 10.6%, indicating good precision of the method, the linear range was 0.05 ng/ml ~ 60 ng/ml. In neutral conditions, hydrolysis has a high degree, and in acid and alkali conditions, there is no other hydrolysates found.