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国家半导体行业VOC排放标准制订研究
引用本文:裴蓓,邵一平,林卫青.国家半导体行业VOC排放标准制订研究[J].上海环境科学,2008,27(6).
作者姓名:裴蓓  邵一平  林卫青
作者单位:上海市环境科学研究院
摘    要:随着近年来我国半导体产业的持续繁荣发展,中国已成为全球半导体制造增长最为迅速的市场。为有效控制监管半导体生产过程中大量使用的各种有机溶剂所产生的废气中可挥发性有机物(VOC)的排放,加强行业污染控制,规范行业环境保护管理工作,对制订半导体行业VOC排放标准进行了研究。概述了半导体行业VOC排放的特点。分析了该行业对VOC排放的治理技术。阐述了美国和中国台湾地区有关半导体行业VOC废气的排放标准。从国内半导体企业VOC治理现状、现有监测技术、VOC排放管理方式等方面探讨了我国半导体行业VOC废气排放标准的制定思路。

关 键 词:半导体制造  废气排放  可挥发性有机物  排放标准  中国

A Study on Working Out National Standard of VOC Emission for Semiconductor Manufacturing Industry
Pei Bei,Shao Yiping,Lin Weiqing.A Study on Working Out National Standard of VOC Emission for Semiconductor Manufacturing Industry[J].Shanghai Environmental Science,2008,27(6).
Authors:Pei Bei  Shao Yiping  Lin Weiqing
Abstract:As semiconductor industry is the user of a good deal of various organic solvents in its manufacturing processes,a specified sectoral volatile organic compound(VOC)emission standard is under studying in order to effectively control the emission and strengthen the environmental management.In respect to semiconductor industry,characters of the VOC emission were summarised and technologies for the emission control were analysed whilst VOC emission standards of the U.S.and Taiwan were also expounded.An approach to formulating the national standard of VOC emission for semiconductor manufacturing industry was discussed in the view of VOC emission control status,available monitoring techniques and VOC emission management in China.
Keywords:Semiconductor manufacturing  Waste gas emission  Volatile organic compound(VOC)  Emission standard  China
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