| 器件温度测试的影响因素 |
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| 引用本文： | 李兴鸿,赵春荣,赵俊萍.器件温度测试的影响因素[J].环境技术,2014(4):6-9. |
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| 作者姓名： | 李兴鸿 赵春荣 赵俊萍 |
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| 作者单位： | 北京微电子技术研究所,北京100076 |
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| 摘 要： | 本文从器件用热像仪的测温过程、常用公式出发,针对测温条件进行了探讨,对公式里面的指数n的取值进行了推算。认为n可取4,但常数C和指数n的取值与波长范围和温度范围有关,要匹配。同时对IC温度分布的精确测量条件也进行了总结。
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| 关 键 词： | 红外热像仪 辐射温度 实际温度 n值 |
Inlfuence Factors of Temperature Measurement on Devices |
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| LI Xing-hong,ZHAO Chun-rong,ZHAO Jun-ping.Inlfuence Factors of Temperature Measurement on Devices[J].Environmental Technology,2014(4):6-9. |
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| Authors: | LI Xing-hong ZHAO Chun-rong ZHAO Jun-ping |
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| Institution: | (Beijing Microelectronic Technology Institute, Beijing i00076) |
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| Abstract: | According to temperature measurement process and basic formula by using thermograph, we discussed measurement condition, calculated index n, and was considered n as 4. While that constant C and index n have a relationship with wavelength and temperature range, C and n should be matched. Finally, we summarized that test conditions about precision IC temperature distribution. |
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| Keywords: | thermograph radiation temperature fact temperature n value |
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