Adsorption and desorption characteristics of semiconductor volatile organic compounds on the thermal swing honeycomb zeolite concentrator

The use of a honeycomb zeolite concentrator and an oxidation process is one of the most popular methods demonstrated to control volatile organic compound (VOCs) emissions from waste gases in semiconductor manufacturing plants. This study attempts to characterize the performance of a concentrator in terms of the removal efficiencies of semiconductor VOCs (isopropyl alcohol [IPA], acetone, propylene glycol methyl ether [PGME], and propylene glycol monomethyl ether acetate [PGMEA]) under several parameters that govern the actual operations. Experimental results indicated that at inlet temperatures of under 40 degrees C and a relative humidity of under 80%, the removal efficiency of a zeolite concentrator can be maintained well over 90%. The optimal rotation speed of the concentrator is between 3 and 4.5 rph in this study. The optimal rotation speed increases with the VOCs inlet concentration. Furthermore, reducing the concentration ratio helps to increase the removal efficiency, but it also increases the incineration cost. With reference to competitive adsorption, PGMEA and PGME are more easily adsorbed on a zeolite concentrator than are IPA and acetone because of their high boiling points and molecular weights.     

Determination of volatile organic compounds in workplace air by multisorbent adsorption/thermal desorption-GC/MS

Investigation of volatile organic compounds (VOCs) was first conducted in the air of class-100 cleanrooms at liquid crystal display (LCD) fabrication facilities. Air samples were collected on multisorbent tubes (including Carbopack B, Carbopack C, and Carbosieve S-III) and analyzed using adsorption/thermal desorption coupled with gas chromatography-mass spectrometry (GC-MS). Optimal conditions lead to average recoveries in the range of 96.2-98.2%, and method detection limits between 0.38 and 0.78 ppb, under the condition of 1-l sampling volume and 80% relative humidity. The method appears to be accurate, sensitive, simple and well-suited for determining VOC distributions from various stages of LCD manufacturing process and temporal variations of the analyte concentrations. About 15 VOCs were identified in workplace air. The major pollutants such as propylene glycol methyl ether acetate (PGMEA), butyl acetate, and acetone that are commonly used in the opto-electronics industry were detected and accurately quantified with the established method.     

Degradation of gas-phase propylene glycol monomethyl ether acetate by ultraviolet/ozone process: A kinetic study

A pilot-scale plug-flow reactor was built to investigate its performance in treating airborne propylene glycol monomethyl ether acetate (PGMEA) via ozonation, ultraviolet (UV) photolysis and UV/O3 technologies. Governing factors, such as the initial molar ratio of ozone (O3) to PG-MEA, UV volumetric electric power input, and moisture content in the influent airstream, were investigated. A 1-L batch reactor was used to investigate some photodegradation characteristics of PGMEA in advance. Experiments were conducted at a fixed influent PGMEA concentration of approximately 50 ppm and an ambient temperature of 26 degrees C. A gas space time of 85 sec in the plug-flow reactor was kept for either ozonation or photolysis reaction, whereas a gas space time of 170 sec was used for the UV/O3 degradation. Results show that an initial molar ratio of O3 to PGMEA of >2.91 and an UV volumetric electric input power of 0.294 W/L(-1) sufficed to obtain PGMEA decompositions of >90% by UV/O3. Kinetic analyses indicate that all types of PGMEA decomposition are pseudo-first order with respect to its concentration. Moisture content (relative humidity = 15-99%) and UV volumetric electric input power (0.147 and 0.294 W/L(-1)) were major factors that strongly affect the PGMEA degradation rate.     

Treatment of Propylene Glycol Monomethyl Ether Acetate in Air Streams by a Biofilter Packed with Fern Chips

Abstract

This study aimed to develop a biofilter packed only with fern chips for the removal of airborne propylene glycol monomethyl ether acetate (PGMEA). Fern chips could avoid the shortcomings of traditional media, such as compaction, drying, and breakdown, which lead to the performance failure of the biofilters. In addition, the fern chip medium has the following merits: (1) simplicity in composition; (2) low pressure drop for gas ?ow (<20 mmH₂O?m^-1); (3) simple in humidification, nutrient addition, pH control, and metabolite removal; (4) economical (US$174–385?m^-3), and (5) low weight (wet basis around 290 kg?m^-3). A two-stage down?ow biofilter (2.18 m in height and 0.4×0.4 m in cross-sectional area) was constructed for the performance test. Both stages were packed with fern chips of 0.30 m in height and 0.40×0.40 m in cross-section. Results indicate that with operation conditions of media moisture content controlled in the range of 50–74%, media pH of 6.5–8.3, empty bed retention time (EBRT) of 0.27–0.4 min, in?uent PGMEA concentrations of 100–750 mg?m^-3, volu-metric organic loading of <170 ?m^-3 ?hr^-1, and nutrition rates of Urea-nitrogen 66 g?m^-3 ?day^-3, potassium dihydrogen phosphate (KH₂PO₄)-phosphorus 13.3 g ?m^-3 ?day^-3, and milk powder 1.00 g?m^-3?day^-1, the fern-chip-packed biofilter could achieve an overall PGMEA removal efficacy of around 94%. Instant milk powder or liquid milk was essential to the good and stable performance of the biofilter for PGMEA removal.     

高压脉冲电晕法治理有机废气实验研究

介绍了采用高压脉冲电晕法去除乙醇,甲醛,二氧甲灶模拟废气的情况。实验在线一板式电晕反应器内进行,考察了电压峰值,气体浓度,停留时间和含湿量等不同因素对去除率的影响。实验结果表明能达到较好的去除效果。     

光催化降解模拟室内挥发性有机污染物研究

用浸渍-提拉法制备玻璃弹簧负载型TiO2薄膜催化剂,在自制的反应器中进行光催化降解由丙酮、甲苯、对二甲苯组成的模拟室内挥发性有机污染物VOCs研究.研究发现:催化剂中掺杂金属离子能影响催化剂的降解效果,降解效果依次为掺铈TiO2＞纯TiO2＞掺银TiO2;气体流量显著影响降解效果,丙酮、甲苯和对二甲苯的最佳降解流量分别为3、5、7 L/min;混合气体中非对称性的极性分子的降解效率高于对称性分子,导致丙酮、对二甲苯组分降解率降低,甲苯降解率增高.     

Microwave-induced combustion of volatile organic compounds in an industrial flue gas over the magnetite fixed-bed

A modified domestic microwave oven was applied to heat a magnetite (Fe₃O₄) fixed-bed for continuous decomposition of volatile organic compounds (VOCs), such as acetone, n-hexane, and dichloromethane (DCM), in a simulated flue gas which contains VOCs equivalent to 2000 ppmv as DCM. Experimental results revealed that effect of the addition of water to the inlet stream on decomposition of DCM in the overall experiment was insignificant. Bulk temperature of the Fe₃O₄ fixed-bed was also found to reach 600 °C from an initial room temperature by 6.5 min under microwave radiation, even though the inlet gas was at a high gas hourly space velocity of 5240 h⁻¹ and a high relative humidity of 75%. Moreover, the VOCs in the inlet stream could be decomposed completely over the Fe₃O₄ fixed-bed by microwave heating at a power level of 645 W at heating time of 10 min. The conversion of VOCs is stable when the Fe₃O₄ fixed-bed has been heated longer than 10 min with microwave radiation. The microwave-induced heating upon Fe₃O₄ fixed-bed processing appears to be not only an energy efficient technique for air pollutions treatment but also a promising technology for variety of VOCs in a flue gas from industrial factory being decomposed simultaneously and completely.     

Nonpoint sources of volatile organic compounds in urban areas-relative importance of land surfaces and air

Volatile organic compounds (VOCs) commonly detected in urban waters across the United States include gasoline-related compounds (e.g. toluene, xylene) and chlorinated compounds (e.g. chloroform, tetrachloroethane [PCE], trichloroethene [TCE]). Statistical analysis of observational data and results of modeling the partitioning of VOCs between air and water suggest that urban land surfaces are the primary nonpoint source of most VOCs. Urban air is a secondary nonpoint source, but could be an important source of the gasoline oxygenate methyl-tert butyl ether (MTBE). Surface waters in urban areas would most effectively be protected by controlling land-surface sources.     

Monitoring method for airborne glymes and its application in fuel exhaust emission measurement.

A monitoring method based on solvent extraction of adsorbed target glymes followed by gas chromatograph-mass spectrometry GC-MS analysis was developed for seven glymes, namely ethylene glycol dimethyl ether, propylene glycol dimethyl ether, ethylene glycol diethyl ether, diethylene glycol dimethyl ether, diethylene glycol diethyl ether, triethylene glycol dimethyl ether, and tetraethylene glycol dimethyl ether. The best recoveries of target glymes were achieved when using a combination of sample collection medium of graphitised carbon black (GCB) with a solvent mixture of methylene chloride and methanol (95/5, v/v). Method detection limits ranged from 1.5 microg/m3 for diethylene glycol diethyl ether to 13.2 microg/m3 for ethylene glycol diethyl ether based on a sample volume of 3.4 1. Using this method, diethylene glycol dimethyl ether and diethylene glycol diethyl ether were detected and measured successfully in diluted vehicle exhausts in diesel fuel engine tests.     

Heterogeneous photocatalysis of aromatic and chlorinated volatile organic compounds (VOCs) for non-occupational indoor air application

The current study evaluated the technical feasibility of applying TiO2 photocatalysis to the removal of low-ppb concentrations of volatile organic compounds (VOCs) commonly associated with non-occupational indoor air quality issues. A series of experiments was conducted to evaluate five parameters (relative humidity (RH), hydraulic diameter (HD), feeding type (FT) for VOCs, photocatalytic oxidation (PCO) reactor material (RM), and inlet port size (IPS) of PCO reactor) in relation to the PCO destruction efficiencies of the selected target VOCs. None of the target VOCs exhibited any significant dependence on the RH, which is inconsistent with a previous study where, under conditions of low humidity and a ppm toluene inlet level, a drop in the PCO efficiency was reported with a decreasing humidity. However, the other four parameters (HD, RM, FT, and IPS) were found to be important for better VOC removal efficiencies as regards the application of TiO2 photocatalytic technology for cleansing non-occupational indoor air. The PCO destruction of VOCs at concentrations associated with non-occupational indoor air quality issues was up to nearly 100%, and the CO generated during PCO was a negligible addition to indoor CO levels. Accordingly, a PCO reactor would appear to be an important tool in the effort to improve non-occupational indoor air quality.     

Effect of Substrate Henry’s Constant on Biofilter Performance

Abstract

Butanol, ether, toluene, and hexane, which have Henry's constants ranging from 0.0005 to 53, were used to investigate the effects of substrate solubility or availability on the removal of volatile organic compounds (VOCs) in trickle-bed biofilters. Results from this study suggest that, although removal of a VOC generally increases with a decrease in its Henry's constant, an optimal Henry's constant range for biofiltration may exist. For the treatment of VOCs with high Henry's constant values, such as hexane and toluene, the transfer of VOCs between the vapor and liquid phases or between the vapor phase and the biofilm is a rate-determining step. However, oxygen (O₂) transfer may become a rate-limiting step in treating VOCs with low Henry's constants, such as butanol, especially at high organic loadings. The results demonstrated that in a gas-phase aerobic biofilter, nitrate can serve both as a growth-controlling nutrient and as an electron acceptor in a biofilm for the respiration of VOCs with low Henry's constants. Microbial communities within the biofilters were examined using denaturing gradient gel electrophoresis to provide a more complete picture of the effect of O₂ limitation and denitrification on biofilter performance.     

Effect of substrate Henry's constant on biofilter performance

Butanol, ether, toluene, and hexane, which have Henry's constants ranging from 0.0005 to 53, were used to investigate the effects of substrate solubility or availability on the removal of volatile organic compounds (VOCs) in trickle-bed biofilters. Results from this study suggest that, although removal of a VOC generally increases with a decrease in its Henry's constant, an optimal Henry's constant range for biofiltration may exist. For the treatment of VOCs with high Henry's constant values, such as hexane and toluene, the transfer of VOCs between the vapor and liquid phases or between the vapor phase and the biofilm is a rate-determining step. However, oxygen (O2) transfer may become a rate-limiting step in treating VOCs with low Henry's constants, such as butanol, especially at high organic loadings. The results demonstrated that in a gas-phase aerobic biofilter, nitrate can serve both as a growth-controlling nutrient and as an electron acceptor in a biofilm for the respiration of VOCs with low Henry's constants. Microbial communities within the biofilters were examined using denaturing gradient gel electrophoresis to provide a more complete picture of the effect of O2 limitation and denitrification on biofilter performance.     

Incinerating Volatile Organic Compounds with Ferrospinel Catalyst MnFe2O4: An Example with Isopropyl Alcohol

Abstract

This paper concerns the incineration of isopropyl alcohol (IPA) using the ferrospinel catalyst MnFe₂O₄. It covers the preparation of the ferrospinel catalyst, the screening of catalytic activity, catalytic incineration testing, and 72-hr decay testing of the catalyst. The experimental results of catalyst screening reveal that the Mn/Fe catalyst is the best of five prepared catalysts (chromium/iron [Cr/Fe], manganese/iron [Mn/Fe], zinc/iron [Zn/Fe], nickel/iron [Ni/Fe], and pure magnetite [Fe₃O₄]). In tests of the catalytic incineration system used to convert IPA, 98% conversion was obtained at a space velocity of 24,000 hr^?1, an oxygen (O₂) content of 21%, 1700 ppm of IPA, and a reaction temperature of 200 °C.     

Incinerating volatile organic compounds with ferrospinel catalyst MnFe2O4: an example with isopropyl alcohol

This paper concerns the incineration of isopropyl alcohol (IPA) using the ferrospinel catalyst MnFe2O4. It covers the preparation of the ferrospinel catalyst, the screening of catalytic activity, catalytic incineration testing, and 72-hr decay testing of the catalyst. The experimental results of catalyst screening reveal that the Mn/Fe catalyst is the best of five prepared catalysts (chromium/iron [Cr/Fe], manganese/iron [Mn/Fe], zinc/iron [Zn/Fe], nickel/iron [Ni/Fe], and pure magnetite [Fe3O4]). In tests of the catalytic incineration system used to convert IPA, 98% conversion was obtained at a space velocity of 24,000 hr(-1), an oxygen (O2) content of 21%, 1700 ppm of IPA, and a reaction temperature of 200 degrees C.     

Closed-Loop Recovery of Site Remediation Gas Phase Contaminants

A novel gas phase treatment system (contaminant absorption and recovery [CAR]) for removal and subsequent recycling of gas phase VOCs from soil vapor extraction/gas stripping systems has been developed. Gas phase removal efficiencies using a packed column contactor exceed 99 percent The VOC-laden absorption fluid is subsequently vacuum-stripped of the VOCs, allowing potential condensation into liquid solvent concentrates. Partition coefficients for trichloroethylene (TCE) in triethylene glycol (TEG) ranged to ca. 5.0 mole fraction gas/mole fraction liquid, indicating a significant capacity for removal from the gas phase. Results of pilot-scale operation indicate favorable removal efficiencies and cost-effective performance in comparison to GAC or thermal destruction processes. System mass transfer coefficient predictions were done, using a variety of mathematical models and compared to experimental results. A modified Mangers and Ponten correlation was found to describe system mass transfer coefficients well. The impact of water carry-over on TCE/TEG partitioning was found to be significant. The standard change in entholpy (ΔH°) and the standard change in volume (ΔV°) values were also calculated, and predictions of temperature and pressure on system performance were evaluated.     

Daily, weekly, and seasonal time courses of VOC concentrations in a semi-urban area near Barcelona

In order to study the daily, weekly, and seasonal patterns and possible origins of air concentrations of volatile organic compounds (VOCs), measurements were taken on a minute-by-minute basis with a PTR-MS in the vicinity of a highway in a semi-urban site near Barcelona. Four periods of the year were chosen and samples were taken under different meteorological conditions and at different phenological stages of the surrounding vegetation. None of the measured VOCs concentrations exceeded air-quality guidelines. The results showed that diurnal, weekly, and seasonal fluctuations in measured VOC concentrations depended on variations in the strength of sources, as well as on photochemical activity and meteorological conditions. There was a decrease in concentrations in most VOCs when mixing depth, photochemical destruction, and wind speed increased at midday. On the other hand, high values of some VOCs occurred at night when the strength of their sinks and the mixing layer decreased. Interestingly, in June, night emissions and concentration peaks of methanol and acetone occurred in periods with dew formation and no wind. VOCs related to anthropogenic emissions presented a weekly pattern of variation with a clear distinction being found between working days and the weekend. The seasonal variation showed higher levels in December for all VOCs, except for isoprene. The thinning of the mixing layer leading to greater concentrations of volatiles and lower wind speeds in winter could account for those higher VOC levels. Benzene and toluene originated mainly from anthropogenic emissions. The sources of acetaldehyde, methanol, and acetone appeared to be mainly biogenic and these compounds were the most abundant of all the measured VOCs. Isoprene concentration patterns suggest a predominantly anthropogenic origin in December and March and a mainly biogenic origin in June and October. All these data provide useful information on the dynamics of VOCs in an area where ozone levels in summer exceed quite often the standard protection thresholds for O₃.     

Method of removal of volatile organic compounds by using wet scrubber coupled with photo-Fenton reaction - Preventing emission of by-products

The photo-Fenton reaction was applied as a novel method for the removal of volatile organic compounds (VOCs) in the gas phase, and its effectiveness was experimentally examined. In conventional VOCs removal methods using a photocatalyst or ozone, VOCs are oxidized in the gas phase. Therefore, incompletely oxidized intermediates, which may have adverse effects on health, are likely to contaminate the treated air. On the other hand, in the VOCs removal method developed in this study, because the VOCs are oxidized in the liquid phase by the photo-Fenton reaction, any incompletely oxidized intermediates produced are confined to the liquid phase. As a result, the contamination of the treated air by these harmful intermediates can be prevented. Using a semi-batch process, it was found that the removal efficiency for toluene in a one-pass test (residence time of 17 s) was 61%, for an inlet toluene gas concentration of 930 ppbv, an initial iron ion concentration of 20 mg L⁻¹, and an initial hydrogen peroxide concentration of 630 mg L⁻¹. The removal efficiency was almost constant as long as H₂O₂ was present in the solution. Proton transfer reaction mass spectrometry analysis confirmed the absence of any incompletely oxidized intermediates in the treated air.     

超重力脱除模拟烟气中一氧化氮简

以NO和N₂的混合气作模拟烟气,以酸性尿素溶液为吸收剂,在超重力机中进行了脱除模拟烟气中NO实验研究。实验考察了混合气中NO初始含量、进气流量、吸收液流量、超重力机转速对NO脱除率的影响,确定了在超重力中尿素吸收NO的适宜条件。实验结果表明,在常温常压下,N₂体积流量为1.0 m³/h,控制NO初始浓度为3 300 mg/m³,吸收液流量为250 L/h,超重力机转速为650 r/min时,NO脱除率可达89.5%。     

Removal of propylene and butylene as individual compounds with compost and wood chip biofilters

Propylene and butylene are highly reactive volatile organic compounds (HRVOCs) in terms of ground-level ozone formation. This study examined the effectiveness of biofiltration in removing propylene and butylene as separate compounds. Specific objectives were (1) to measure maximum removal efficiencies for propylene and butylene and the corresponding microbial acclimation times, which will be useful in the design of future biofilters for removal of these compounds; (2) to compare removal efficiencies of propylene and butylene for different ratios of compost/hard wood-chip media; and (3) to identify the microorganisms responsible for propylene and butylene degradation. Two laboratory-scale polyvinyl chloride biofilter columns were filled with 28 in. of biofilter media (compost/wood-chip mixtures of 80:20 and 50:50 ratios). Close to 100% removal efficiency was obtained for propylene for inlet concentrations ranging from 2.9 x 10(4) to 6.3 x 10(4) parts per million (ppm) (232-602 g/m3-hr) and for butylene for inlet concentrations ranging from 91 to 643 ppm (1.7-13.6 g/m3-hr). The microbial acclimation period to attain 100% removal efficiency was 12-13 weeks for both compounds. The lack of similar microbial species in the fresh and used media likely accounts for the long acclimation time required. Both ratios of compost/wood chips (80:20 and 50:50) gave similar results. During the testing, media pH increased slightly from 7.1 to 7.5-7.7. None of the species in the used media that treated butylene were the same as those in the used media that treated propylene, indicating that different microbes are adept at degrading the two compounds.     

投加沸石粉活性污泥搅拌参数优化及其对离子交换速率的影响研究

在0.3 m×0.3 m×0.36 m方形搅拌槽中初步探讨了不同的搅拌器类型、安装高度以及曝气强度对投加了沸石粉的高浓度活性污泥悬浮状态的影响,并根据固液悬浮理论确定了最佳的搅拌参数.同时,进行了不同搅拌速率下沸石对污水中氨氮的离子交换动力学研究.结果表明在无曝气的情况下,选用三叶推进式搅拌器,搅拌器离底高度为1/3搅拌器直径时所需要的临界搅拌速率最低.曝气有助于反应池中污泥的悬浮,对于30 g/L的污泥,当曝气强度由10 m3/(m2·h)增大1倍时,临界搅拌速率降低了50%.搅拌速率为120 r/min时,沸石对污水中氨氮的离子交换速率受膜扩散过程控制,当其增大为180 r/min时,其控制步骤为粒内扩散,沸石粉活性污泥达到完全均匀悬浮的临界搅拌速率不足以满足传质的要求.需增大一定程度.