Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

The influence of mariculture on mercury distribution in sediments and fish around Hong Kong and adjacent mainland China waters

To study the influence of mariculture on mercury (Hg) speciation and distribution in sediments and cultured fish around Hong Kong and adjacent mainland China waters, sediment samples were collected from six mariculture sites and the corresponding reference sites, 200-300 m away from the mariculture sites. Mariculture activities increased total mercury, organic matter, carbon, nitrogen and sulfur concentrations in the surface sediments underneath mariculture sites, possibly due to the accumulation of unconsumed fish feed and fish excretion. However, methylmercury (MeHg) concentrations and the ratio of MeHg to THg (% MeHg) in sediments underneath mariculture sites were lower than the corresponding reference sites. The % MeHg in sediments was negatively correlated (r = −0.579, p < 0.05) with organic matter (OM) content among all sites, indicating that OM may have inhibited Hg methylation in surface sediments. Three mariculture fish species were collected from each mariculture site, including red snapper (Lutjanus campechanus), orange-spotted grouper (Epinephelus coioides) and snubnose pompano (Trachinotus blochii). The average MeHg concentration in fish muscle was 75 μg kg⁻¹ (wet weight), and the dietary intake of MeHg through fish consumption for Hong Kong residents was 0.37 μg kg⁻¹ week⁻¹, which was lower than the corresponding WHO limits (500 μg kg⁻¹ and 1.6 μg kg⁻¹ week⁻¹).     

Removal of 2-chlorophenol from water using rice-straw derived ash

Removal of 2-chlorophenol from water using rice-straw derived ash (RSDA) was evaluated in this study to compare with commercial activated carbon. RSDA was obtained by burning rice-straw at 400 °C and 700 °C for 1 h. This ash can provide a better adsorbent for 2-chlorophenol. The adsorption capacities of RSDA at 400 °C and 700 °C are 37 and 52 mg g?1 at pH 4, respectively, and decrease to 9.0 and 40 mg g?1 at pH 10. Adsorption of either neutral or anionic 2-cholorphenol by the RSDA are shown as L-shaped nonlinear isotherms, suggesting surface adsorption rather than partitioning is occurring. At higher-burning temperatures, the surface area, porosity, point of zero charge and aromaticity of the resultant RSDA increase, but the oxygen content and surface acidity decrease. The combined effects result in a higher 2-chlorophenol adsorption of RSDA at 700 °C, which shows a slight pH effect on the adsorption of 2-chlorophenol, due to the lower content of oxygen-containing functional groups. Oxygen-containing functional groups contribute to surface acidity and H-bonding sites for adsorbed water, which compromises the interaction between 2-chlorophenol and the adsorbents. Thus, it suggests that rice-straw derived carbon (RSDC) can be used as an effective low-cost substitute material for activated carbon for removal of chlorophenols from wastewater.     

添加不同量的腐殖酸对猪粪堆肥中主要养分变化的影响

腐殖酸是一种可以控制堆肥氮素损失的天然固定剂,通过研究腐殖酸对猪粪堆肥过程中主要养分含量变化的影响,确定了腐殖酸的最佳加入量.结果表明,加入5%含量(占鲜猪粪重)的腐殖酸最有利于发酵反应的进行,能够促进有机质的分解,有效控制氮素损失,可使速效钾含量增加,但对有效磷的转化能力影响不大;与其他处理相比,加入5%含量的腐殖酸...     

聚合氯化铝污泥对磷的吸附动力学及热力学

聚合氯化铝污泥（polyaluminium chloride sludge,PACS）是指以聚合氯化铝（PAC）为混凝剂的城镇给水厂在生产过程中所产生的污泥。采用批量吸附实验考察了PACS对磷的吸附动力学及热力学行为。结果表明,吸附反应发生1 h后,PACS对磷的吸附量达到平衡吸附量的75%～90%,随后PACS对磷的...     

有机膨润土的制备及其在6-硝废水处理中的应用

以CTMAB为改性剂制备有机膨润土,并用改性后的膨润土吸附6-硝废水.膨润土改性条件为:液固体积(mL)质量(g)比6∶1,pH值为1,反应温度为60℃,反应时间为1 h进行酸活化;将上述酸活化的膨润土按膨润土阳离子交换容量的100%加人CTMAB,反应时间为80 min得到有机膨润土;6-硝废水吸附条件为:取上述有机...     

Triboelectrostatic separation for PP and ABS plastics in end of life passenger vehicles

Journal of Material Cycles and Waste Management - The recovery and utilization of automotive plastics are global concerns because of the increasing number of end-of-life vehicles. Passenger...     

CuCoOx/TiO2催化氧化NO性能研究

采用浸渍法制备了CuCoOx/TiO₂催化剂,考察了焙烧温度、反应温度、氧含量、NO浓度和空间速度对催化剂催化氧化NO性能的影响,并考察了催化剂的抗硫抗水性能。XRD、TPR和BET分析表明,350℃焙烧的催化剂具有CuCo₂O₄尖晶石结构,比表面积大,对NO的氧化效果好。在空速为5 000 h^-1,NO进口浓度500 mg/m³,含氧量10%的条件下,反应温度300℃时NO转化率可达79.5%,250℃时NO转化率接近50%。该催化剂具有良好的单独抗SO₂、抗H₂O毒化性能,H₂O和SO₂同时存在时很快失活。该催化剂可用于不同时含H₂O和SO₂的含NO气体催化氧化后再吸收处理。     

长短桩复合地基承载力发挥系数取值研究

根据水泥土长短桩复合地基试验结果,得到了考虑荷载水平的水泥土长短桩复合地基承载力计算公式。然后,考虑复合地基中桩体、桩间土和复合地基沉降量之间的相互关系,利用现场载荷试验成果,对单桩复合地基和长短桩复合地基的桩间土承载力发挥系数和合理的s/b取值范围进行了对比研究,得到了长短桩复合地基桩间土承载力发挥系数的计算方法。结果表明:长短桩复合地基桩体先于桩间土出现破坏,桩体极限荷载点对应的复合地基s/b值为s/b的上限;当垫层模量Ec为100M Pa时,长短桩复合地基s/b上限为0.0034,对应的桩间土承载力发挥系数为0.29。     

基于GIS的陇南灾区建设用地适宜性评价

以甘肃省陇南市地震灾区为例,运用AHP法和GIS空间分析方法,综合考虑了地区气候地形、人口分布、交通区位、经济基础和地震易发程度等影响因子,并通过用地适宜性分区,对地区自然生态和社会经济格局进行重新审视,从协调资源、环境、人口、经济的相互关系出发,空间开发强调因地制宜,即让开发成本低、资源环境容量大的地区承担高强度的开发建设活动;而让生态和地质环境脆弱、开发难度大的区域承担生态维护和生态产业功能。结果表明：陇南市用地适宜性呈现出极大的地缘差异性,适宜发展用地主要分布于东北部丘陵盆地地区,南部地区以限制发展用地为主,西北部地区由适度发展用地和限制发展用地构成。其中适宜发展用地占地区总面积1727%,适度发展用地占4441%,限制发展用地占3831%。