Total toxicity equivalents emissions of SF6, CHF3, and CCl2F2 decomposed in a RF plasma environment

Sulfur hexafluorine compound (SF6), trifluoromethane (CHF3) and diclorodifluoromethane (CCl2F2) are extensively used in the semiconductor industry. They are global warming gases. Most studies have addressed the effective decomposition of fluorine compounds, rather than the toxicity of decomposed by-products. Hence, the concepts of toxicity equivalents (TEQs) were applied in this work. The results indicated that HF and SiF4 were the two greatest contributors of TEQ to the SF6/H2/Ar plasma system, while F2 and SiF4 were the two greatest contributors to the SF6/O2/Ar system. Additionally, SiF4 and HF were the two greatest contributors of TEQ to both the CHF3/H2/Ar and CHF3/O2/Ar plasma systems. HF and HCl were the two greatest contributors of TEQ to the CCl2F2/H2/Ar plasma system, and Cl2 and COCl2 were the two greatest contributors to the CCl2F2/O2/Ar system. HCl and HF can be recovered using wet scrubbing, which reduces the toxicity of these emission gases. Consequently, the hydrogen-based plasma system was a better alternative for treating gases that contained SF6, CHF3 and CCl2F2 from the TEQs point of view.     

Development of regenerative dye impregnated mesoporous silica materials for assessing exposure to ammonia

The mesostructured materials MCM-41 and SBA-15 were studied as possible supports of bromocresol green (BG) dye impregnation for the ammonia gas detection because of their large surface area, high regenerative property, and high thermal stability. X-ray diffraction, transmission electron microscopy, scanning electron microscope, and N2 adsorption analysis were used to characterize the prepared materials. These materials could sense ammonia via visible color change from yellowish-orange to blue color. The color change process of the nanostructured materials was fully reversible during 10 cyclic tests. The results indicated that the ammonia absorption responses of the two nanostructured materials were both very sensitive, and high linear correlation and high precision were achieved. As the gaseous ammonia concentrations were 50 and 5 ppmv, the response times for the SBA-15/BG were only 1 and 5 min, respectively. Moreover the BG dye-impregnated SBA-15 was less affected by the variation in the relative humidity. It also had faster response for the detection of NH3, as well as lower manufacturing price as compared to that of the dye-impregnated MCM-41. Such feature enables SBA-15/BG to be a very promising material for the detection of ammonia gas.     

Decomposition of SF6 in an RF Plasma Environment

Abstract

Sulfur hexafluoride (SF₆)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of SF₆. The decomposition fraction of SF₆ [η_SF6 (C_in–C_out)/C_in x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O₂/SF₆ ratio in an SiO₂ reactor. The species detected in both SF₆/Ar and SF₆/O₂/Ar RF plasmas were SiF₄, SO₂, F₂, SO₂F₂, SOF₂, SOF₄, S₂F₁₀, S₂OF₁₀, S₂O₂F₁₀, and SF₄. The results revealed that at 40 W, η_SF6 exceeded 99%, and the reaction products were almost all converted into stable compounds such as SiF₄, SO₂, and F₂ with or without the addition of oxygen. Sulfur oxyfluorides such as SO₂F₂, SOF₂, SOF₄, S₂OF₁₀, and S₂O₂F₁₀ were produced only below 40 W. The results of this work can be used to design a plasma/chemical system for online use in a series of a manufacturing process to treat SF₆-containing exhaust gases.     

Simultaneous Sampling of Gas- and Aerosol-Phase TDI with a Triple Filter System

Abstract

A new triple filter system sampler/model is proposed for the precise and accurate simultaneous sampling and determination of gas- and aerosol-phase 2,4-toluene diisocyanate (TDI). The system consists of two front Teflon filters for sampling aerosol-phase TDI and a final coated glass fiber filter to collect gas-phase TDI. The aerosol-phase TDI is collected on the first Teflon filter, while the second Teflon filter is used to estimate gaseous TDI adsorbed by the first. According to the gas adsorption test of two Teflon filters in series, the TDI gas adsorption fraction of the two filters is almost the same. Results of the evaporation test using pure TDI aerosols collected on the Teflon filter show that significant evaporation of the compound does not occur during sampling. These two findings allow the use of a model to estimate accurate gasand aerosol-phase TDI concentrations. The comparison test with an annular denuder shows that the triple filter system can minimize the TDI sampling bias between the dual filter and the annular denuder systems.     

Assessing heavy metal pollution in the surface soils of a region that had undergone three decades of intense industrialization and urbanization

Heavy metals in the surface soils from lands of six different use types in one of the world’s most densely populated regions, which is also a major global manufacturing base, were analyzed to assess the impact of urbanization and industrialization on soil pollution. A total of 227 surface soil samples were collected and analyzed for major heavy metals (As, Cd, Co, Cr, Cu, Fe, Hg, Mn, Ni, Pb, and Zn) by using microwave-assisted acid digestion and inductively coupled plasma–mass spectrometry (ICP-MS). Multivariate analysis combined with enrichment factors showed that surface soils from the region (>7.2?×?10⁴ km²) had mean Cd, Cu, Zn, and As concentrations that were over two times higher than the background values, with Cd, Cu, and Zn clearly contributed by anthropogenic sources. Soil pollution by Pb was more widespread than the other heavy metals, which was contributed mostly by anthropogenic sources. The results also indicate that Mn, Co, Fe, Cr, and Ni in the surface soils were primarily derived from lithogenic sources, while Hg and As contents in the surface soils were controlled by both natural and anthropogenic sources. The pollution level and potential ecological risk of the surface soils both decreased in the order of: urban areas?>?waste disposal/treatment sites?～?industrial areas?>?agricultural lands?～?forest lands?>?water source protection areas. These results indicate the significant need for the development of pollution prevention and reduction strategies to reduce heavy metal pollution for regions undergoing fast industrialization and urbanization.     

Disinfection by-product formation and mutagenic assay caused by preozonation of groundwater containing bromide

Brominated organic and inorganic by-products are generated during ozonation of groundwater containing high bromide concentrations. This study measured concentrations of bromate, bromoform, bromoacetic acids, bromoacetonitriles, bromoacetone, 2,4-dibromophenol and aldehyde generated by ozonation. The potential mutagenicity of ozonated waters was assessed using the Ames and Microtox tests. Test results for the 18 ozonated groundwater samples demonstrate that bromate formation is associated with high pH, bromide and alkalinity content, low levels of dissolved organic carbon (DOC) and ammonia, and low alkalinity. Brominated organic by-products were correlated with high bromide ion and natural organic matter content, and low ammonia concentrations. The Ames test results demonstrate that all extracts from ozonated water have mutagenic activity; however, the 18 raw groundwater samples had no mutagenicity. The Microtox test results also show that the ozonated water samples were highly toxic. Generally, both bromide and DOC content promoted the formation of ozonation by-products and mutagenicity. Controlling of bromide and DOC concentrations is an effective method of reducing potential by-product formation and eliminating mutagenicity problems associated with groundwater ozonation.     

Nitrate controls methyl mercury production in a streambed bioreactor

Organic carbon bioreactors provide low-cost, passive treatment of a variety of environmental contaminants but can have undesirable side effects in some cases. This study examines the production of methyl mercury (MeHg) in a streambed bioreactor consisting of 40 m3 of wood chips and designed to treat nitrate (NO?) in an agricultural drainage ditch in southern Ontario (Avon site). The reactor provides 30 to 100% removal of NO?-N concentrations of 0.6 to 4.4 mg L(-1), but sulfate (SO?(2-)) reducing conditions develop when NO? removal is complete. Sulfate reducing conditions are known to stimulation the production of MeHg in natural wetlands. Over one seasonal cycle, effluent MeHg ranged from 0.01 to 0.76 ng L(-1) and total Hg ranged from 1.3 to 3.4 ng L(-1). During all sampling events when reducing conditions were only sufficient to promote NO?(-) reduction (or denitrification) ( = 5, late fall 2009, winter 2010), MeHg concentrations decreased in the reactor and it was a net sink for MeHg (mean flux of -5.1 μg m(-2) yr(-1)). During all sampling events when SO?(2-) reducing conditions were present ( = 6, early fall 2009, spring 2010), MeHg concentrations increased in the reactor and it was a strong source of MeHg to the stream (mean flux of 15.2 μg m(-2) yr(-1)). Total Hg was consistently removed in the reactor (10 of 11 sampling events) and was correlated to the total suspended sediment load ( r2 = 0.69), which was removed in the reactor by physical filtration. This study shows that organic carbon bioreactors can be a strong source of MeHg production when SO?(2-) reducing conditions develop; however, maintaining NO?-N concentrations > 0.5 mg L suppresses the production of MeHg.     

Characteristics of bricks made from waste steel slag

The characteristics of bricks made from steel slag were investigated in this research. Slag addition was shown to reduce the required firing temperature. When the firing temperature was greater than 1050 degrees C and the slag addition less than 10%, the bricks met ROC national standard CNS 3319 third-class brick for builders. The percentage of slag increased as the quartz and kaolin decreased in the sintered samples while the magnesium aluminum silicate and calcium silicate increased. There were no new crystal phases observed in these samples.     

WATER BUDGET COMPUTATION FOR A SHALLOW LAKE-LAKE OKEECHOBEE,FLORIDA1

ABSTRACT: The water budget computation in shallow lakes is complicated because marsh vegetation can transpire large quantities of lake water. Thus, a model including the marsh zone evapotranspiration (WET) was developed to compute the water budget for Lake Okeechobee. Three periods of testing (1969–74), planning (1963–74), and recorded period (1952–77) were used to compare the differences of the sum of storage deviation between the WET and conventional methods (WOET). Results of the WOET method showed that the sum of stage deviations were 87.42 cm (2.868 ft.), 231.80 cm (7.605 ft.), and 284.50 cm (9.333 ft.) in the testing, planning, and recorded periods, respectively. These stage deviations are equivalent in the same order to 29, 76, and 93 percent of the lake volume. In general, the WET method not only was applicable to compute the water budget for the lake but also reduced the sum of storage deviation by about 42, 31, and 49 percent, respectively, in those three periods. The storage deviation in WET method was reduced on an average to about 2 percent each year in all three periods, and the deviations were scattered more randomly than in WOET.     

LANDSAT MID-INFRARED DATA AND GIS IN REGIONAL SURFACE SOIL-MOISTURE ASSESSMENT1

ABSTRACT: Landsat satellite Thematic Mapper (TM) data were used to assess regional soil moisture conditions. The mid-infrared (MIR) data of TM band 7 were overlain onto four principal land-use categories (Agricultural/Irrigated, Urban/Clearings, Forest/ Wetlands, Water) using a geographic information system (GIS). M data were used to assess four qualitative surface soil-moisture conditions (water/very wet, wet, moist, and dry) within each land-use category of a 208,354 ha southwestern Florida study area. The MIR response was inversely related to the qualitative surface soil-moisture content. Integration of Landsat TM MIR data with land use through GIS appears to be a useful technique for high-resolution regional soil moisture assessment, and further research to reline this technique is recommended.