Decomposition of SF6 in an RF Plasma Environment

Abstract

Sulfur hexafluoride (SF₆)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of SF₆. The decomposition fraction of SF₆ [η_SF6 (C_in–C_out)/C_in x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O₂/SF₆ ratio in an SiO₂ reactor. The species detected in both SF₆/Ar and SF₆/O₂/Ar RF plasmas were SiF₄, SO₂, F₂, SO₂F₂, SOF₂, SOF₄, S₂F₁₀, S₂OF₁₀, S₂O₂F₁₀, and SF₄. The results revealed that at 40 W, η_SF6 exceeded 99%, and the reaction products were almost all converted into stable compounds such as SiF₄, SO₂, and F₂ with or without the addition of oxygen. Sulfur oxyfluorides such as SO₂F₂, SOF₂, SOF₄, S₂OF₁₀, and S₂O₂F₁₀ were produced only below 40 W. The results of this work can be used to design a plasma/chemical system for online use in a series of a manufacturing process to treat SF₆-containing exhaust gases.     

Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

Analyzing coastal wetland change in the Yancheng National Nature Reserve,China

Coastal zones provide habitat cores and corridors that maintain the diversity of entire landscapes, and they can form the cornerstone elements of regional conservation strategies. Natural environmental driving factors and excessive anthropogenic activities play important roles in coastal wetland change. Many studies have used remote sensing images to map and assess coastal wetland change on local or regional scales. This paper aims to provide insight into coastal wetland change in the Yancheng National Nature Reserve (YNNR) using remote sensing technology and landscape metrics analysis. The results reveal that grass flat and reed areas have significantly decreased, whereas agriculture fields, aquaculture ponds and built-up areas have continuously increased from 1988 to 2006. The spatial pattern of the coastal landscape has become fragmented and heterogeneous under great pressure from rapid economic development and population growth. The wetland changes have important impacts on natural habitat of the red-crowned cranes. The results of this study provide basic information that is required for developing measures toward a sustainable management and conservation of the YNNR.     

Phthalate exposure in pregnant women and their children in central Taiwan

Phthalate exposure was found to be associated with endocrine disruption, respiratory effects, reproductive and developmental toxicity. The intensive use of plastics may be increasing the exposure to phthalates in Taiwanese population, particularly for young children.We studied phthalate metabolites in pregnant women and their newborns in a prospective cohort from a medical center in Central Taiwan. One hundred maternal urine samples and 30 paired cord blood and milk samples were randomly selected from all of participants (430 pregnant women). Eleven phthalate metabolites (MEHP, 5OH-MEHP, 2cx-MEHP, 5cx-MEPP, 5oxo-MEHP, MiBP, MnBP, MBzP, OH-MiNP, oxo-MiNP, and cx-MiNP) representing the exposure to five commonly used phthalates (DEHP, di-isobutyl phthalate (DiBP), DnBP, BBP, DiNP) were measured in urine of pregnant women, cord serum and breast milk after delivery, and in urine of their children. Exposure was estimated with excretion factors and correlation among metabolites of the same parent compound. Thirty and 59 urinary samples from 2 and 5 years-old children were randomly selected from 185 children successfully followed.Total urinary phthalate metabolite concentration (geometric mean, μg L⁻¹) was found to be higher in 2-years-olds (398.6) and 5-years-olds (333.7) than pregnant women (205.2). Metabolites in urine are mainly from DEHP. The proportion of DiNP metabolites was higher in children urine (4.39 and 8.31%, ages 2 and 5) than in adults (0.83%) (p < 0.01). Compared to urinary levels, phthalate metabolite levels are low in cord blood (37.45) and milk (14.90). DEHP metabolite levels in women’s urine and their corresponding cord blood are significantly correlated. Compared to other populations in the world, DEHP derived metabolites in maternal urine were higher, while phthalate metabolite levels in milk and cord blood were similar. The level of phthalate metabolites in milk and cord blood were comparable to those found in other populations. Further studies of health effects related to DEHP and DiNP exposure are necessary for the children.     

Removal of PAHs with surfactant-enhanced soil washing: influencing factors and removal effectiveness

PAH removal with surfactant enhanced washing was investigated through a series of laboratory tests to examine the effect of stirring speed, washing time, surfactant concentration, liquid/solid ratio, temperature, and on-and-off mode. The first four factors show significant influence on the PAH removal while the latter two do not. Total removal ratio and a new proposed parameter, solubilization percentage, are used to evaluate the effectiveness quantitatively.     

Occurrence, sources, and inventory of hexabromocyclododecanes (HBCDs) in soils from Chongming Island, the Yangtze River Delta (YRD)

Hexabromocyclododecanes (HBCDs) is a concern due to their large usage combining with physico-chemical properties and toxicity to wildlife and human. However, very limited data were reported on HBCDs in soils, especially from rural area. In this study, 22 soil samples were collected from Chongming Island at estuary of the Yangtze River Delta, to investigate the level, diasteroisomer profile, potential sources, and mass inventory of HBCDs. The total concentrations ranged from not detected to 93.8 pg g⁻¹ dry weight (dw) with a mean of 23.3 pg g⁻¹ dw, which was at the low end of the global levels. The wide distribution of HBCDs in soils suggested that the local emissions of HBCD-containing materials and/or the inputs via atmospheric transport from other regions were two possible sources. Variation of HBCDs levels was observed in different types of soils. Woodland, tideland and road soils contained slightly higher HBCDs than those of farmland and grassland. Overall, γ-HBCD was the dominant diasteroisomer in soils, followed by α-HBCD and β-HBCD. Significant but weak correlations were only found between α-HBCD and β-HBCD versus TOC content in soils. Currently, the mass inventory of HBCDs in soils of Chongming Island was 5.3 kg. Based on these data, we gave perspective on human intake of HBCDs via soil ingestion by age. Local resident’s intakes ranged from 15.5 to 97.8 fg kg body weight⁻¹ d⁻¹, in which children are exposed more than adults.     

Reversed association between levels of prostate specific antigen and levels of blood cadmium and urinary cadmium

Prostate cancer associated with cadmium exposure may indicate a link between prostate specific antigen (PSA) and levels of blood cadmium (BCd) and urinary cadmium (UCd). Thus, these associations were investigated. We recruited 295 men, 50 years of age and above from a health check-up program at a health center as subjects of the study. They completed a self-reported questionnaire and provided fasting samples of blood and urine for cadmium assay. The assay was performed using atomic absorption spectrophotometry. Blood samples were also collected for the assays of total cholesterol and high-density lipoprotein measures. The means of BCd and UCd increased with age and the means of all subjects were 1.19 ± 1.04 μg L⁻¹ and 1.37 ± 1.76 μg g⁻¹ creatinine, respectively. The PSA levels were positively associated with the lipid levels, but reversely associated with BCd and UCd levels. The multivariate logistic regression analysis showed that men with PSA ? 4.0 ng mL⁻¹ had an odds ratio (OR) of 0.4 (95% CI = 0.1-0.9) to have BCd > 0.49 μg L⁻¹, and an OR of 0.4 (95% CI = 0.2-1.0) to have UCd > 0.45 μg g⁻¹ creatinine. In conclusion, the PSA levels are reversely associated with BCd and UCd levels.     

China's Regional Policies:Progress of the 11~(th) Five Year Plan Period and Prospect of the 12~(th) Five Year Plan Period

During the 11th Five Year Plan period,China improved its policy system for the overall strategy of regional development,and established and completed the policies intended for the promotion of regional cooperation and interaction.Thereupon,regional development in China took on a series of positive changes such as the enhancement of coordination.During the 12th Five Year Plan period,China will fully implement and continuously improve the policy measures for development in its four major regions,strengthen differentiated guidance to different regions in line with the planning for major function-oriented zones,and accelerate the establishment of basic systems that facilitate coordinated regional development.