Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

Decomposition of Gas Phase 1,3-Butadiene by Ultraviolet/Ozone Process

Abstract

A pilot-scale plug-flow reactor was built to investigate its performance in treating airborne 1,3-butadiene (BD) via ozonation (O₃) and ultraviolet (UV)/O₃ technologies. Governing factors, such as the initial molar ratio of ozone to BD, UV volumetric electric input power, and moisture content in the influent airstream, were investigated. Experiments were conducted at an influent BD concentration of ～50 ppm, an ambient temperature of 26 °C, and a gas retention time of 85 sec. Results show that an initial molar ratio of ozone to BD of 3.5 and 2 sufficed to obtain BD decompositions of >90% for ozonation and UV/O₃, respectively. The UV irradiance did not directly promote the decomposition of BD, rather, it played a role in promoting the production of secondary oxidants, such as hydroxyl radicals. Kinetic analyses indicate that both types of BD decomposition are peudo–first-order with respect to BD concentrations. Moisture content (relative humidity = 40–99%) and UV volumetric electric input power (0.147 and 0.294 W/L) are both factors that weakly affect the rate of BD decomposition. Economic evaluation factors, including both energy of ozone production and UV electric input power, were also estimated.     

Predicting Cutoff Aerodynamic Diameter and Sharpness of Single Round-Nozzle Impactors with a Finite Impaction Plate Diameter

Abstract

This investigation numerically examined the cutoff aerodynamic diameter (da₅₀) and the sharpness (GSD) of the particle collection efficiency curve of impactors with a finite impaction plate diameter. Results revealed that the inertial impactors have a limited cutoff aerodynamic diameter at different air velocities. The extreme value of the cutoff aerodynamic diameter increases with the nozzle diameter (W)/the plate diameter (D_c). The computed da₅₀/D_c values of the impactors increase with W/D_c at various Reynolds numbers (Re) and with the nozzle-toplate distance (S)/D_c when Re is 100. The value of GSD slightly increases with W/D_c for Re of 10 and 100, although the effect of S/D_c on GSD is not evident at various Res. The particle collection efficiency curve of the impactor with a lower Re is less sharp than that with a high Re at various W/D_c and S/D_c values. Statistical equations closely fitted the obtained numerical results for Res of 10–3000. The equations are useful for directly calculating the cutoff aerodynamic diameter and the sharpness of the particle collection efficiency curve for single round-nozzle impactors with a finite impaction D_c.     

Phthalate exposure in pregnant women and their children in central Taiwan

Phthalate exposure was found to be associated with endocrine disruption, respiratory effects, reproductive and developmental toxicity. The intensive use of plastics may be increasing the exposure to phthalates in Taiwanese population, particularly for young children.We studied phthalate metabolites in pregnant women and their newborns in a prospective cohort from a medical center in Central Taiwan. One hundred maternal urine samples and 30 paired cord blood and milk samples were randomly selected from all of participants (430 pregnant women). Eleven phthalate metabolites (MEHP, 5OH-MEHP, 2cx-MEHP, 5cx-MEPP, 5oxo-MEHP, MiBP, MnBP, MBzP, OH-MiNP, oxo-MiNP, and cx-MiNP) representing the exposure to five commonly used phthalates (DEHP, di-isobutyl phthalate (DiBP), DnBP, BBP, DiNP) were measured in urine of pregnant women, cord serum and breast milk after delivery, and in urine of their children. Exposure was estimated with excretion factors and correlation among metabolites of the same parent compound. Thirty and 59 urinary samples from 2 and 5 years-old children were randomly selected from 185 children successfully followed.Total urinary phthalate metabolite concentration (geometric mean, μg L⁻¹) was found to be higher in 2-years-olds (398.6) and 5-years-olds (333.7) than pregnant women (205.2). Metabolites in urine are mainly from DEHP. The proportion of DiNP metabolites was higher in children urine (4.39 and 8.31%, ages 2 and 5) than in adults (0.83%) (p < 0.01). Compared to urinary levels, phthalate metabolite levels are low in cord blood (37.45) and milk (14.90). DEHP metabolite levels in women’s urine and their corresponding cord blood are significantly correlated. Compared to other populations in the world, DEHP derived metabolites in maternal urine were higher, while phthalate metabolite levels in milk and cord blood were similar. The level of phthalate metabolites in milk and cord blood were comparable to those found in other populations. Further studies of health effects related to DEHP and DiNP exposure are necessary for the children.     

Polybrominated diphenyl ethers (PBDEs) and indicator polychlorinated biphenyls (PCBs) in marine fish from four areas of China

The levels of polybrominated diphenyl ethers (PBDEs) and indicator polychlorinated biphenyls (PCBs) were determined in marine fish from four areas of China (South China Sea, Bohai Sea, East China Sea, and Yellow Sea) using GC/NCI-MS and GC/ITMS, respectively. Total concentrations of eight PBDEs (BDE-28, 47, 99, 100, 153, 154, 183 and 209) in all samples ranged from 0.3 ng g⁻¹ ww (wet weight) to 700 ng g⁻¹ ww, with median and mean values of 85 ng g⁻¹ ww and 200 ng g⁻¹ ww, respectively. BDE-209 and BDE-47 were the major congeners in all samples, contributing 54% and 19% to the total concentration, respectively. The sum of seven indicator PCB levels (CB-28, 52, 101, 118, 138, 153, and 180) ranged from 0.3 ng g⁻¹ ww to 3.1 μg g⁻¹ ww, with median and mean values of 6.4 ng g⁻¹ ww and 398 ng g⁻¹ ww, respectively. High contributions of CB-138 (32%) and CB-153 (25%) were found in all samples. In general, pollutants measured in this study were at high levels when compared with previous studies from other regions in the world. The relative abundance of BDE-209 may suggest that deca-BDE sources existed in studied area. And principal component analysis (PCA) showed that there were other PBDE sources in Yellow Sea. The pattern and PCA showed that PCB pollutions came from similar sources in the studied areas. In addition, concentrations of ∑₇PBDEs (u/209) were strongly correlated with those of ∑₇PCBs in all fish (r = 0.907, n = 44).     

中国ESDPM模型及其在交通需求预测中的应用

交通运输是国民经济的基础部门.未来随着国民经济的快速发展和人均收入水平的不断提高,交通运输部门的能源消费量将会以较高的速度增长,在决定我国终端能耗的局面中占据着非常重要的地位.本文应用集合模型方法建立了中国能源服务需求预测模型( Energy service demand projection model,ESDPM),在对未来经济和社会发展进行合理假设的基础上,预测了中国未来一直到2050年的客运和货运周转量以及小汽车保有量,并进行了国家和地区间的比较.结果显示,2005-2050年中国的客运和货运周转量将分别以年均增长率5.9%和5.1%的速度增长,2050年客运和货运周转量将分别达到23.1万亿人·km和74.7万亿t·km.小汽车将随着人均GDP的快速增加呈现出明显的"S"型增长关系,在小汽车拥有率饱和水平选取为0.4时,小汽车保有量将稳定在5.8亿辆左右.     

农村生活固体垃圾的处理现状及影响因素

随着我国农村经济与农民收入水平的快速提高,农村生活固体垃圾产生与排放的数量快速增加,已经严重影响了农村环境、农民健康和农业可持续发展.该文的主要目的是基于甘肃和河北省60个村和240个农户的调研资料,深入了解农村生活固体垃圾的处理和管理现状及影响生活固体垃圾有效处理的制约因素.结果表明,大多数村没有处理生活固体垃圾的设施,总体看甘肃省拥有的处理设施要好于河北省.超过一半的村中生活固体垃圾都没有人管理,但部分村开始制定相关的管理计划.描述性统计分析和计量模型的分析结果表明,农村生活固体垃圾的处理状况与农民人均收入水平的提高和交通便利程度的改进有显著正相关关系,而非农就业机会的增加不利于当地生活垃圾的处理.     

论可持续发展观的贯彻与水资源论证制度的完善

可持续发展理念要求以环境资源承载力为依据规范人们开发、利用自然资源的行为。水资源论证制度是贯彻、实施可持续发展理念的良好制度形式,对于促进经济社会可持续发展意义重大,但我国现行立法中规定的水资源论证制度还不完善,影响了制度作用的充分发挥。完善相关立法,提高水资源论证制度的法律地位,是在水资源管理与保护方面贯彻可持续发展要求的关键任务。     

Distribution and bioaccumulation of steroidal and phenolic endocrine disrupting chemicals in wild fish species from Dianchi Lake, China

The distribution and bioaccumulation of steroidal and phenolic endocrine disrupting chemicals (EDCs) were studied in various tissues of wild fish species from Dianchi Lake, China. In muscle tissue, 4-tert-octylphenol, 4-cumylphenol, 4-nonlyphenol and bisphenol A were detected in fish from each sampling site, with maximal concentrations of 4.6, 4.4, 18.9 and 83.5 ng/g dry weight (dw), respectively. Steroids (estrone, 17β-estradiol 17α-ethynylestradiol and estriol) were found at lower levels (<11.3 ng/g dw) and less frequently in muscle samples. The highest concentrations of steroids and phenols were found in liver, followed by those in gill and the lowest concentration was found in muscle. The field bioconcentration factors (BCFs) of phenols were calculated in fish species ranged from 18 to 97. Moreover, the measured tissue concentrations were utilized in order to estimate water concentration of steroids (4.4-18.0 ng/L). These results showed that steroidal and phenolic EDCs were likely ubiquitous contaminants in wild fish.     

Assessment of heavy metal pollution from a Fe-smelting plant in urban river sediments using environmental magnetic and geochemical methods

Environmental magnetic proxies provide a rapid means of assessing the degree of industrial heavy metal pollution in soils and sediments. To test the efficiency of magnetic methods for detecting contaminates from a Fe-smelting plant in Loudi City, Hunan Province (China) we investigated river sediments from Lianshui River. Both magnetic and non-magnetic (microscopic, chemical and statistical) methods were used to characterize these sediments. Anthropogenic heavy metals coexist with coarse-grained magnetic spherules. It can be demonstrated that the Pollution Load Index of industrial heavy metals (Fe, V, Cr, Mo, Zn, Pb, Cd, Cu) and the logarithm of saturation isothermal remanent magnetization, a proxy for magnetic concentration, are significantly correlated. The distribution heavy metal pollution in the Lianshui River is controlled by surface water transport and deposition. Our findings demonstrate that magnetic methods have a useful and practical application for detecting and mapping pollution in and around modern industrial cities.