Abatement of sulfur hexafluoride emissions from the semiconductor manufacturing process by atmospheric-pressure plasmas

Sulfur hexafluoride (SF6) is an important gas for plasma etching processes in the semiconductor industry. SF6 intensely absorbs infrared radiation and, consequently, aggravates global warming. This study investigates SF6 abatement by nonthermal plasma technologies under atmospheric pressure. Two kinds of nonthermal plasma processes--dielectric barrier discharge (DBD) and combined plasma catalysis (CPC)--were employed and evaluated. Experimental results indicated that as much as 91% of SF6 was removed with DBDs at 20 kV of applied voltage and 150 Hz of discharge frequency for the gas stream containing 300 ppm SF6, 12% oxygen (O2), and 40% argon (Ar), with nitrogen (N2) as the carrier gas. Four additives, including Ar, O2, ethylene (C2H4), and H2O(g), are effective in enhancing SF6 abatement in the range of conditions studied. DBD achieves a higher SF6 removal efficiency than does CPC at the same operation condition. But CPC achieves a higher electrical energy utilization compared with DBD. However, poisoning of catalysts by sulfur (S)-containing species needs further investigation. SF6 is mainly converted to SOF2, SO2F4, sulfur dioxide (SO2), oxygen difluoride (OF2), and fluoride (F2). They do not cause global warming and can be captured by either wet scrubbing or adsorption. This study indicates that DBD and CPC are feasible control technologies for reducing SF6 emissions.     

Simultaneous removal of nitrogen oxide/nitrogen dioxide/sulfur dioxide from gas streams by combined plasma scrubbing technology

Oxides of nitrogen (NOx) [nitrogen oxide (NO) + nitrogen dioxide (NO2)] and sulfur dioxide (SO2) are removed individually in traditional air pollution control technologies. This study proposes a combined plasma scrubbing (CPS) system for simultaneous removal of SO2 and NOx. CPS consists of a dielectric barrier discharge (DBD) and wet scrubbing in series. DBD is used to generate nonthermal plasmas for converting NO to NO2. The water-soluble NO2 then can be removed by wet scrubbing accompanied with SO2 removal. In this work, CPS was tested with simulated exhausts in the laboratory and with diesel-generator exhausts in the field. Experimental results indicate that DBD is very efficient in converting NO to NO2. More than 90% removal of NO, NOx, and SO2 can be simultaneously achieved with CPS. Both sodium sulfide (Na2S) and sodium sulfite (Na2SO3) scrubbing solutions are good for NO2 and SO2 absorption. Energy efficiencies for NOx and SO2 removal are 17 and 18 g/kWh, respectively. The technical feasibility of CPS for simultaneous removal of NO, NO2, and SO2 from gas streams is successfully demonstrated in this study. However, production of carbon monoxide as a side-product (approximately 100 ppm) is found and should be considered.     

短程硝化的实现、维持与过程控制的研究现状

短程生物脱氮技术目前倍受人们的关注,国内外学者对短程硝化提出了多种实现及维持的控制途径,但仍存在着一些问题。由于活性污泥法中DO,ORP,pH的变化规律从不同角度不同程度地反映了生物脱氮反应的进程,所以用它们作为控制参数就可以对生物脱氮反应进行过程控制。在分析中,通过对国内外短程硝化控制途径的研究现状与发展趋势的分析和总结,针对目前在实现短程硝化及维持短程硝化各种途径中存在的问题,提出了通过在线检测DO,pH,ORP来实现与维持短程硝化的新思路。     

Adsorptive conversion of nitrogen dioxide from etching vent gases over activated carbon

Some metal etching operations emit limited flow rates of waste gases with reddish-brown NO₂ fume, which may cause visual and acidic-odor complaints, as well as negative health effects. In this study, tests were performed by passing caustic-treated waste gases vented from Al-etching operations through columns packed either with virgin or regenerated granular activated carbon (GAC) to test their adsorptive conversion performance of NO₂ in the gases. The gases contained 5–55 ppm NO₂ and acetic and nitric acids of below 3 ppm. Exhausted carbon was regenerated by scrubbing it with caustic solution and water, and dried for further adsorption tests. Results indicate that with an (empty bed residence time (EBRT) of 0.15 sec for the gas through the GAC-packed space, around 60% of the influent NO₂ of 54 ppm could be removed, and 47% of the removed NO₂ was converted by and desorbed from the carbon as NO. GAC used in the present study could be regenerated at least twice to restore its capacity for NO₂ adsorption. Within EBRTs of 0.076–0.18 sec, the adsorptive conversion capacity was linearly varied with EBRT. In practice, with an EBRT of 0.20 sec, a conversion capacity of 0.80 kg NO₂ (kg GAC)^?1 with an influent NO₂ of 40 ppm can be used as a basis for system design.

Implications: Some metal etching operations emit waste gases with reddish-brown (yellow when diluted) NO₂ fume which may cause visual and acidic-odor complaints, as well as negative health effects. This study provides a simple process for the adsorptive conversion of NO₂ in caustic-treated waste gases vented from metal-etching operations through a GAC column. With an EBRT of 0.20 sec, a conversion capacity of 0.80 kg NO₂ (kg GAC)^?1 with an influent NO₂ of 40 ppm can be used as a basis for system design. Saturated GAC can be regenerated at least twice by simply scrubbing it with aqueous caustic solution.     

铜铈复合氧化物催化降解甲基橙

采用水热法制备的铜铈复合氧化物能够直接催化降解甲基橙,探究了铜铈摩尔比、pH、投加量对催化降解效果的影响。研究发现,pH=3.5、Cu/Ce=1、投加量1.0 g·L-1时,甲基橙的降解效果最佳。在0.5~1.0 g·L-1之间时,随着投加量的增加,甲基橙的脱色速率加快,脱色率也有所增加。随着溶液中的pH逐渐下降,甲基橙脱色率有所增加,pH=3.5时,甲基橙脱色率最高;而进一步降低pH至3.0时,脱色率反而下降,可能是强酸腐蚀了金属氧化物表层,降低了甲基橙的降解效果。甲基橙主要因其被降解而脱色,促使甲基橙脱色的活性物质为·OH,且与体系中的分子氧有关,反应过程消耗一定的H+。     

The fractionation and geochemical characteristics of rare earth elements measured in ambient size-resolved PM in an integrated iron and steelmaking industry zone

Environmental Science and Pollution Research - Improved understanding of the fractionation and geochemical characteristic of rare earth elements (REEs) from steel plant emissions is important due...     

Combined effects of nitrogen addition and organic matter manipulation on soil respiration in a Chinese pine forest

The response of soil respiration (Rs) to nitrogen (N) addition is one of the uncertainties in modelling ecosystem carbon (C). We reported on a long-term nitrogen (N) addition experiment using urea (CO(NH₂)₂) fertilizer in which Rs was continuously measured after N addition during the growing season in a Chinese pine forest. Four levels of N addition, i.e. no added N (N0: 0 g N m⁻² year⁻¹), low-N (N1: 5 g N m⁻² year⁻¹), medium-N (N2: 10 g N m⁻² year⁻¹), and high-N (N3: 15 g N m⁻² year⁻¹), and three organic matter treatments, i.e. both aboveground litter and belowground root removal (LRE), only aboveground litter removal (LE), and intact soil (CK), were examined. The Rs was measured continuously for 3 days following each N addition application and was measured approximately 3–5 times during the rest of each month from July to October 2012. N addition inhibited microbial heterotrophic respiration by suppressing soil microbial biomass, but stimulated root respiration and CO₂ release from litter decomposition by increasing either root biomass or microbial biomass. When litter and/or root were removed, the “priming” effect of N addition on the Rs disappeared more quickly than intact soil. This is likely to provide a point of view for why Rs varies so much in response to exogenous N and also has implications for future determination of sampling interval of Rs measurement.

     

臭氧活性炭-后置砂滤工艺对水中农药的控制效能

选择我国饮用水水质标准中有相关规定,以及部分用量较大或虽被禁用但仍有残留的农药共25种,对黄浦江水源水以及采用臭氧活性炭-后置砂滤工艺的某水厂工艺段出水中的浓度分布进行了调查,评估了砂滤后置工艺条件下相应农药的实际处理效果。结果表明:原水中有包括莠去津、乐果、六氯苯、敌敌畏、乙草胺、丁草胺、仲丁威和p,p'-DDT的8种农药检出,且总浓度较高达到760 ng/L,其中莠去津和乙草胺含量较高,最高浓度分别达到531 ng/L和277 ng/L;从季节性分布来看,春季总农药浓度最高达760 ng/L,秋季最低为175 ng/L。从工艺去除效果来看,臭氧活性炭砂滤后置工艺对农药的总体去除率为62%~78%,与冬春季相比,夏秋季节的农药的去除率提高约10%左右,这可能与高温期微生物活性较高有关。值得关注的是,砂滤后置工艺与同期常规臭氧活性炭工艺相比农药的总去除率要低10%左右,应结合总体出水水质情况对其进一步评估。     

超积累植物与煤在混烧过程中重金属的迁移特性

通过在管式炉中进行了煤与超积累植物——伴矿景天的混烧实验,主要研究了不同燃烧温度、不同氮氧比气氛以及煤与伴矿景天的不同混合质量比对混烧过程中重金属(Cd、Zn与Pb)迁移情况的影响,并应用XRD技术分析灰渣中重金属的存在形式。实验分析表明:升高温度能在不同程度上增强Cd、Zn与Pb的挥发,提高其在飞灰中的含量;与单独燃烧伴矿景天相比,煤与伴矿景天混烧更有利于Cd和Zn保留在底渣中,但不利于Pb保留在底渣中;对于不同氮氧比气氛而言,Zn和Cd在底渣中的含量随着气氛中氧气含量的提高而升高,而气氛对Pb的影响是随着氧气含量的增加,Pb在底渣的含量是先增加后减少;当煤在混烧中的比例较高时,Cd更多向飞灰迁移,Pb和Zn则更多地残留于底渣。     

植物种类与水力负荷对人工湿地去除污染物的交互作用

人工湿地去污效能不仅受水力负荷(HL)影响,还与植物种类有关。为研究这2种因素对污染物去除的交互作用,根据植物根系长度,分别构建短根型、中根型及长根型植物潜流人工湿地中试系统,在运行稳定后,考察不同植物种类在不同水力负荷(152、230、305和460 mm/d)下的去污效果。结果表明:植物种类对COD去除率的影响差别不显著,对氮磷去除率有显著影响,且去除率符合长根型 > 中根型 > 短根型;水力负荷对COD、TN、NH4+-N和TP的去除均有显著影响,随着水力负荷减小去除率均逐渐升高;植物种类与水力负荷的交互作用对各污染物去除率均有显著影响,且受水力负荷影响较大,TN、NH4+-N的去除在水力负荷较小时交互作用较明显,COD去除的最优HL为230 mm/d。因此,在人工湿地设计时应考虑植物种类与水力负荷的交互作用。