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81.
Decomposition of SF6 in an RF plasma environment 总被引:1,自引:0,他引:1
Shih M Lee WJ Tsai CH Tsai PJ Chen CY 《Journal of the Air & Waste Management Association (1995)》2002,52(11):1274-1280
Sulfur hexafluoride (SFd)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of SF6. The decomposition fraction of SF6 [etaSF6 (C(in)-C(out))/C(in) x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O2/SF6 ratio in an SiO2 reactor. The species detected in both SF6/Ar and SF6/O2/ Ar RF plasmas were SiF4, SO2, Fe2, SO2F2, SOF2, SOF4, S2F10, S2OF10, S2O2F10, and SF4. The results revealed that at 40 W, etaSF6 exceeded 99%, and the reaction products were almost all converted into stable compounds such as SiF4, SO2, and F2 with or without the addition of oxygen. Sulfur oxyfluorides such as SO2F2, SOF2, SOF4, S2OF10, and S2O2F10 were produced only below 40 W. The results of this work can be used to design a plasma/chemical system for online use in a series of a manufacturing process to treat SF6-containing exhaust gases. 相似文献
82.
ABSTRACT: Bayesian decision theory provides a procedure for the use of subjective data in a decision-making situation related to urban water resources development. This procedure is effectual in pursuing a set of goals and in transforming individual or group indecisiveness into satisfactory decisions. This approach is highlighted due to its capability to incorporate seemingly unquantifiable, abstract factors into the decision-making process. It is realized that the soliciting of expert and general public opinion is indispensable in making choices for the welfare of the general public from alternative courses of action under uncertainty. The analysis presented here considers engineering alternatives, quality, quantity, cost and the intangible public response in an integrated effort for the selection of optimum strategies in urban water resources development. 相似文献
83.
Shih TS Lee WJ Shih M Chen YC Huang SL Wang LC Chang-Chien GP Tsai PJ 《Environment international》2008,34(1):102-107
This study was set out to assess polychlorinated dibenzo-p-dioxins and dibenzofurans (PCDD/Fs) exposures and health-risk impact posed on sinter plant workers. One sinter plant located in southern Taiwan was selected and their workers were divided into four exposure groups based on their work tasks, including raw material charging workers, sintering grate workers, shredding workers, and others. Results show that their mean total PCDD/F and the corresponding total I-TEQ exposure levels shared the same trend as: shredding workers>others>sintering grate workers>raw material charging workers. For all selected exposure groups, their PCDD/F exposures were dominated by the particle phase contents. Congener profiles of the gaseous+particle phase PCDD/Fs were found with more fractions of high chlorinated congeners than low chlorinated congeners. The lifetime average daily doses (LADDs) and their resultant excess cancer risks (ECRs) found for sinter plant workers were higher than those residents living at the residential area and rural area, but were lower than those living at the nearby of the selected sinter plant, urban area, industrial area. Considering ECRs of the sinter plant workers were still higher than 10(-6) suggesting the need for adopting proper control measurements for reducing workers' PCDD/F exposures, particularly for those sinter zone workers. 相似文献
84.
Shih L. Chen John C. Kramlich W. Randall Seeker David W. Pershing 《Journal of the Air & Waste Management Association (1995)》2013,63(10):1375-1379
This paper summarizes an experimental study which was conducted to investigate the chemical constraints of the reburning process and identify reburning configurations for optimal NOx reduction in coal-fired boilers. Tests were performed on a bench scale tunnel furnace to characterize and optimize the fuel-rich reburning zone and the fuel-lean burnout zone independently. Detailed measurements ofunburned hydrocarbons, CO, NH3, and HCN were made at the reburning zone exit. The influence of the concentrations of reactive species was examined as were temperature effects for both the reburning and burnout zone. Results indicated that reburning zone chemistry was not rate limiting. The impacts of temperature and burnout zone oxidation were of major importance. Integration of the optimum reburning and burnout zone configurations resulted in increased NOx reduction. Over 85 percent reduction in NOx emissions was achieved with ammonium sulfate injection in the burnout zone under optimum reburning conditions. 相似文献
85.
Yunxue Xia Dong Qiu Zhong Lyv Jianshuai Zhang Narendra Singh Kaimin Shih Yuanyuan Tang 《Frontiers of Environmental Science & Engineering》2023,17(5):61
86.
Sheng-Chi Yang T. Riddin J. B. Adams Shang-Shu Shih 《Journal of Coastal Conservation》2014,18(4):459-469
The spatial distribution of mangroves in the Mngazana Estuary under sea level rise induced by climate change, together with different substrate elevation change scenarios was predicted for 2020, 2050 and 2100. The present inundation frequency tolerance range was from 0.8 to 31.2 %, equivalent to substrate elevation thresholds of 1.1 and 1.7 m amsl. These thresholds were measured by field surveys and analysis of a gauge station situated near the mouth of the estuary. The predictions were based on the assumption that the inundation frequency tolerance range of mangrove stands remains constant in the future. Through the use of a digital elevation model an initial increase of 2.10 ha year?1 was found in mangrove area between present and 2020 (from 122.6 to 143.6 ha). This was due to habitat becoming available that is currently too compacted for seedling establishment to occur. This compaction resulted from human and cattle traffic for grazing. Thereafter there would be a mean loss of 0.66 ha year?1 from 2020 through 2100. Landward migration of mangroves would not take place due to the elevation limit of adjacent non-mangrove areas. In addition, the loss rate would increase to 1.01 ha year?1 under insufficient sediment accretion, but would decrease to 0.18 ha year?1 under thriving mangroves condition. The analysis of sea storm event in September 2008 showed that local water level increased by 28 cm and maximum affected area was 87.0 ha (about 71 % of mangrove stands). The inundation continued over 5 days. The results indicated that the combination impact of sea level rise, substrate elevation change and sea storm would possibly be a threat to tropical African estuaries with large flat intertidal areas and mangroves. 相似文献
87.
Shih JS Burtraw D Palmer K Siikamäki J 《Journal of the Air & Waste Management Association (1995)》2008,58(9):1117-1129
The animal husbandry industry is a major emitter of ammonia (NH3), which is a precursor of fine particulate matter (PM2.5)--arguably, the number-one environment-related public health threat facing the nation. The industry is also a major emitter of methane (CH4), which is an important greenhouse gas (GHG). We present an integrated process model of the engineering economics of technologies to reduce NH3 and CH4 emissions at dairy operations in California. Three policy options are explored: PM offset credits for NH3 control, GHG offset credits for CH4 control, and expanded net metering policies to provide revenue for the sale of electricity generated from captured methane (CH4) gas. Individually these policies vary substantially in the economic incentives they provide for farm operators to reduce emissions. We report on initial steps to fully develop the integrated process model that will provide guidance for policy-makers. 相似文献
88.
Tung-Sheng Shih Minliang Shih Wen-Jhy Lee Sheng-Lung Huang Lin-Chi Wang Yu-Cheng Chen Perng-Jy Tsai 《Chemosphere》2009,74(11):1463-1470
This study measured particle size distributions of polychlorinated dibenzo-p-dioxins and dibenzofurans (PCDD/Fs) in two workplace atmospheres of the sintering grate and rough roll shredder in a sintering plant, and to assess their workers’ health-related exposures. We found that the PCDD/F concentration of the sintering grate (site A = 14.47 pg m−3) was lower than that of the rough roll shredder (site B = 17.20 pg m−3). Particle size distributions of PCDD/Fs were in the form of the unimodal with the mass median aerodynamic diameter (MMAD) of 4.74 μm and 5.23 μm, and geometric standard deviation (σg) of 3.15 and 2.15 for the site A and B, respectively. The above results suggest that the workplace of the site A had a less fraction of coarse particles than that of the site B. The estimated PCDD/F concentrations of the inhalable fraction (11.0 pg m−3) and thoracic fraction (8.89 pg m−3) of the site A were lower than those of the site B (12.4 and 9.39 pg m−3, respectively). But to the contrary the estimated respirable fraction of the site A (5.05 pg m−3) was slightly higher than that of the site B (4.93 pg m−3). Our results clearly indicate the importance to conduct particle size segregating samplings for assessing human PCDD/F exposures. 相似文献
89.
Yuanyuan Tang Xiaoye Xin Kaimin Shih Ziyi Wang 《Journal of Material Cycles and Waste Management》2018,20(4):2110-2116
With aluminum as the predominant element, incineration residues from municipal solid waste and sewage sludge may be reused as precursors for zinc stabilization. As solid-state reactions are influenced by the crystal sizes of the reactants, the aluminum-containing components with different crystal sizes in the incineration residues may affect zinc transformation and immobilization. In this study, Al2O3 was prepared with a variety of crystal sizes to simulate the aluminum-rich incineration residue matrix, and ZnO was mixed with Al2O3 to study the zinc incorporation mechanisms. The crystal sizes of Al2O3 were determined using Rietveld refinement. Quantification results showed that ~?30% of zinc was incorporated into the ZnAl2O4 spinel when Al2O3 with the largest crystal size was used. However, the zinc transformation was enhanced twofold when the Al2O3 precursor had the smallest crystal size. This study confirmed the potential enhancement of zinc immobilization by nanoscale crystals in simulated aluminum-rich incineration residues. By improving zinc stabilization efficiencies using poorly crystallized aluminum-containing compounds instead of increasing the energy consumption by increasing the sintering temperatures, we can achieve an economic and environmental win–win scenario for the beneficial utilization of incineration residues of municipal solid waste and sewage sludge. 相似文献
90.
Yu-Ling Chen Yi-Hsuan Shih Chao-Heng Tseng Sy-Yuan Kang Huang-Chin Wang 《Mitigation and Adaptation Strategies for Global Change》2013,18(8):1125-1139
This study examines the monetary value of social costs—private costs and negative externalities—that could be avoided by energy conservation actions. A novel Air Resource Co-Benefits (ARCoB) model has been developed in this study to assess the comprehensive social benefits of greenhouse gas GHG mitigation policy. The rollback model is used to estimate changes in air pollutant concentrations attributed to the emission reductions. Change in ozone concentration is converted from non-methane hydrocarbons based on the maximum ozone increment reactivity. In addition to saved medical expenditure, years of potential life lost (YPLL) is estimated based on the exposure-response coefficients for mortality and is calculated with abridged life table. Two cases of energy efficiency improvement in different scales are analyzed to estimate the annual co-benefits of abatements of air pollutants and greenhouse gas in 2009: 1) the energy intensity reduction in the industrial sector and 2) energy saving at Taipei Taiwan City Hall. Results indicate the saved energy cost accounted for 66 % and 70 % in the first and second case, respectively, and was a major part of the total benefit from energy conservation. The saved air pollution fee was 7.8–8.5 times lower than the averted health cost of medical expenditure, which was US$10.34 million in the first case, in which there were also averted YPLL of 3,478 person-years or averted deaths of 311 persons per year. 相似文献