Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

Analysis of a Summertime PM2.5 and Haze Episode in the Mid-Atlantic Region

Abstract

Observations of the mass and chemical composition of particles less than 2.5 μm in aerodynamic diameter (PM_2.5), light extinction, and meteorology in the urban Baltimore-Washington corridor during July 1999 and July 2000 are presented and analyzed to study summertime haze formation in the mid-Atlantic region. The mass fraction of ammoniated sulfate (SO₄ ^2-) and carbonaceous material in PM_2.5 were each ～50% for cleaner air (PM_2.5 < 10 μg/m³) but changed to ～60% and ～20%, respectively, for more polluted air (PM_2.5 > 30 μg/m³). This signifies the role of SO₄ ^2- in haze formation. Comparisons of data from this study with the Interagency Monitoring of Protected Visual Environments network suggest that SO₄ ^2? is more regional than carbonaceous material and originates in part from upwind source regions. The light extinction coefficient is well correlated to PM_2.5 mass plus water associated with inorganic salt, leading to a mass extinction efficiency of 7.6 ± 1.7 m²/g for hydrated aerosol. The most serious haze episode occurring between July 15 and 19, 1999, was characterized by westerly transport and recirculation slowing removal of pollutants. At the peak of this episode, 1-hr PM_2.5 concentration reached ～45 μg/m³, visual range dropped to ～5 km, and aerosol water likely contributed to ～40% of the light extinction coefficient.     

The Reuse of Biosludge as an Adsorbent from a Petrochemical Wastewater Treatment Plant

Abstract

Biosludge was obtained from a petrochemical industry’s biological wastewater treatment plant. Zinc chloride (ZnCl₂) was used as a sludge activation agent during the pyrolytic process. Scanning electron microscope (SEM) image photographs, element composition, surface functional group, and pore structure were analyzed for the sludge adsorbent characteristics. Results indicated the proper ZnCl₂-immersed concentration, pyrolytic temperature, and time could produce adsorbent from the bio-sludge. The optimal conditions for a larger surface area adsorbent were 3 M ZnCl₂-immersed sludge pyrolyzed at 600 °C for 30 min and washed with 3 N hydrochloric acid (HCl) solution and distilled water. The predominant pore size of the sludge adsorbent was the mesopore.     

Decomposition of SF6 in an RF Plasma Environment

Abstract

Sulfur hexafluoride (SF₆)-contained gas is a common pollutant emitted during the etching process used in the semiconductor industry. This study demonstrated the application of radio-frequency (RF) plasma in the decomposition of SF₆. The decomposition fraction of SF₆ [η_SF6 (C_in–C_out)/C_in x 100%] and the mole fraction profile of the products were investigated as functions of input power and feed O₂/SF₆ ratio in an SiO₂ reactor. The species detected in both SF₆/Ar and SF₆/O₂/Ar RF plasmas were SiF₄, SO₂, F₂, SO₂F₂, SOF₂, SOF₄, S₂F₁₀, S₂OF₁₀, S₂O₂F₁₀, and SF₄. The results revealed that at 40 W, η_SF6 exceeded 99%, and the reaction products were almost all converted into stable compounds such as SiF₄, SO₂, and F₂ with or without the addition of oxygen. Sulfur oxyfluorides such as SO₂F₂, SOF₂, SOF₄, S₂OF₁₀, and S₂O₂F₁₀ were produced only below 40 W. The results of this work can be used to design a plasma/chemical system for online use in a series of a manufacturing process to treat SF₆-containing exhaust gases.     

Hydrothermal treatment for inactivating some hygienic microbial indicators from food waste–amended animal feed

To achieve the hygienic safety of food waste used as animal feed, a hydrothermal treatment process of 60–110 °C for 10–60 min was applied on the separated food waste from a university canteen. Based on the microbial analysis of raw waste, the inactivation of hygienic indicators of Staphylococcus aureus (SA), total coliform (TC), total aerobic plate counts (TPC), and molds and yeast (MY) were analyzed during the hydrothermal process. Results showed that indicators' concentrations were substantially reduced after hydrothermal treatment, with a greater reduction observed when the waste was treated with a higher temperature and pressure and a longer ramping time. The 110 °C hydrothermal treatment for 60 min was sufficient to disinfect food waste as animal feed from the viewpoint of hygienic safety. Results obtained so far indicate that hydrothermal treatment can significantly decrease microbial indicators' concentrations but does not lead to complete sterilization, because MY survived even after 60 min treatment at 110 °C. The information from the present study will contribute to the microbial risk control of food waste–amended animal feed, to cope with legislation on food or feed safety.

Implications: Reduction of microbial indicators at ramping time and holding time during the hydrothermal process showed that hydrothermal treatment is an effective method to achieve hygienic feed from food waste to a certain extent, but the conditions researched in this study were not enough for the complete sterilization of food waste, because of the different heat resistance of bacteria and spores.     

PM2.5 source apportionment with organic markers in the Southeastern Aerosol Research and Characterization (SEARCH) study

Positive matrix factorization (PMF) and effective variance (EV) solutions to the chemical mass balance (CMB) were applied to PM_2.5 (particulate matter with an aerodynamic diameter <2.5 μm) mass and chemically speciated measurements for samples taken from 2008 to 2010 at the Atlanta, Georgia, and Birmingham, Alabama, sites. Commonly measured PM_2.5 mass, elemental, ionic, and thermal carbon fraction concentrations were supplemented with detailed nonpolar organic speciation by thermal desorption-gas chromatography/mass spectrometry (TD-GC/MS). Source contribution estimates were calculated for motor vehicle exhaust, biomass burning, cooking, coal-fired power plants, road dust, vegetative detritus, and secondary sulfates and nitrates for Atlanta. Similar sources were found for Birmingham, with the addition of an industrial source and the separation of biomass burning into open burning and residential wood combustion. EV-CMB results based on conventional species were qualitatively similar to those estimated by PMF-CMB. Secondary ammonium sulfate was the largest contributor, accounting for 27–38% of PM_2.5, followed by biomass burning (21–24%) and motor vehicle exhaust (9–24%) at both sites, with 4–6% of PM_2.5 attributed to coal-fired power plants by EV-CMB. Including organic compounds in the EV-CMB reduced the motor vehicle exhaust and biomass burning contributions at both sites, with a 13–23% deficit for PM_2.5 mass. The PMF-CMB solution showed mixing of sources within the derived factors, both with and without the addition of speciated organics, as is often the case with complex source mixtures such as those at these urban-scale sites. The nonpolar TD-GC/MS compounds can be obtained from existing filter samples and are a useful complement to the elements, ions, and carbon fractions. However, they should be supplemented with other methods, such as TD-GC/MS on derivitized samples, to obtain a wider range of polar compounds such as sterols, sugars, and organic acids. The PMF and EV solutions to the CMB equations are complementary to, rather than replacements for, each other, as comparisons of their results reveal uncertainties that are not otherwise evident.

Implications:?Organic markers can be measured on currently acquired PM_2.5 filter samples by thermal methods. These markers can complement element, ion, and carbon fraction measurements from long-term speciation networks. Applying the positive matrix factorization and effective variance solutions for the chemical mass balance equations provides useful information on the accuracy of the source contribution estimates. Nonpolar compounds need to be complemented with polar compounds to better apportion cooking and secondary organic aerosol contributors.     

Performance measurement for incineration plants using multi-activity network data envelopment analysis: The case of Taiwan

This study proposes the use of multi-activity network data envelopment analysis to appraise how incineration plants in Taiwan perform. Sample data from 2006 is used to examine the trade-offs between efficiency enhancement and pollution abatement. The respective efficiencies of the waste treatment and electricity generation are also assessed in a unified framework. The empirical results indicate that it is more important to improve the efficiency of waste treatment activity than of electricity generation activity in order to enhance the overall performance of Taiwan's incinerators. Since ownership, location and length of operations do not in general affect their performance, any improvement has to come from the careful monitoring of each process of the waste treatment operations. Furthermore, given that the policy in Taiwan has moved away from incineration to recycling, the problem of an over-supply of incinerators may become apparent in the near future. Our results indicate that the availability of capacity size may be an important factor when policy-makers consider whether to close down some existing incinerators.     

四川省能源-社会经济-环境复合系统能流分析

能源是现代社会发展的重要基础,其在社会经济发展中占有不可替代的地位。以四川省统计年鉴及相关数据资料为基础,参考美国能流图绘制了四川省2010年的能流图,并对四川省2005~2010年间的能源输入、输出、消耗,以及相应的污染物排放进行了分析,分析发现:近年来能源消费总量增长迅速,年均增长率达10.8%,能源对外依存度较高,尤其是石油。能源消耗结构有待进一步优化,传统化石能源所占比重偏高,2010年达77.18%。同时构建了能源-社会经济-环境复合系统能流分析指标,分析了2005~2010年四川省能源、经济、环境两两子系统及三者系统之间的协调度,结果显示:四川省能源-经济-环境系统协调度不断上升,2010年三者综合协调度0.97238。最后根据能流分析、污染物排放水平、协调度分析等结果,提出了四川省能源发展战略、能流的优化管理、节能减排等对策建议。     

上海市青浦区PM10污染状况及其与气象要素的关系

利用2006-2010年上海市青浦区PM10和同期地面气象要素的监测资料,定量分析PM10的季节变化规律以及PM10与降雨量、大气湿度和风速之间的关系。分析结果表明:PM10浓度在夏季处于低值,冬季处于高值;5mm/d以上的降雨对PM10有显著的清除作用,且春夏季降雨的清除作用大于秋冬季节。PM10浓度与大气湿度基本呈负相关关系。风速在一定范围内有利于PM10的扩散但不至造成扬尘,春夏季节的适宜风速是1.5～3.5m/s,冬季的适宜风速是1.5～2.5m/s。