Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

Analyzing coastal wetland change in the Yancheng National Nature Reserve,China

Coastal zones provide habitat cores and corridors that maintain the diversity of entire landscapes, and they can form the cornerstone elements of regional conservation strategies. Natural environmental driving factors and excessive anthropogenic activities play important roles in coastal wetland change. Many studies have used remote sensing images to map and assess coastal wetland change on local or regional scales. This paper aims to provide insight into coastal wetland change in the Yancheng National Nature Reserve (YNNR) using remote sensing technology and landscape metrics analysis. The results reveal that grass flat and reed areas have significantly decreased, whereas agriculture fields, aquaculture ponds and built-up areas have continuously increased from 1988 to 2006. The spatial pattern of the coastal landscape has become fragmented and heterogeneous under great pressure from rapid economic development and population growth. The wetland changes have important impacts on natural habitat of the red-crowned cranes. The results of this study provide basic information that is required for developing measures toward a sustainable management and conservation of the YNNR.     

Phthalate exposure in pregnant women and their children in central Taiwan

Phthalate exposure was found to be associated with endocrine disruption, respiratory effects, reproductive and developmental toxicity. The intensive use of plastics may be increasing the exposure to phthalates in Taiwanese population, particularly for young children.We studied phthalate metabolites in pregnant women and their newborns in a prospective cohort from a medical center in Central Taiwan. One hundred maternal urine samples and 30 paired cord blood and milk samples were randomly selected from all of participants (430 pregnant women). Eleven phthalate metabolites (MEHP, 5OH-MEHP, 2cx-MEHP, 5cx-MEPP, 5oxo-MEHP, MiBP, MnBP, MBzP, OH-MiNP, oxo-MiNP, and cx-MiNP) representing the exposure to five commonly used phthalates (DEHP, di-isobutyl phthalate (DiBP), DnBP, BBP, DiNP) were measured in urine of pregnant women, cord serum and breast milk after delivery, and in urine of their children. Exposure was estimated with excretion factors and correlation among metabolites of the same parent compound. Thirty and 59 urinary samples from 2 and 5 years-old children were randomly selected from 185 children successfully followed.Total urinary phthalate metabolite concentration (geometric mean, μg L⁻¹) was found to be higher in 2-years-olds (398.6) and 5-years-olds (333.7) than pregnant women (205.2). Metabolites in urine are mainly from DEHP. The proportion of DiNP metabolites was higher in children urine (4.39 and 8.31%, ages 2 and 5) than in adults (0.83%) (p < 0.01). Compared to urinary levels, phthalate metabolite levels are low in cord blood (37.45) and milk (14.90). DEHP metabolite levels in women’s urine and their corresponding cord blood are significantly correlated. Compared to other populations in the world, DEHP derived metabolites in maternal urine were higher, while phthalate metabolite levels in milk and cord blood were similar. The level of phthalate metabolites in milk and cord blood were comparable to those found in other populations. Further studies of health effects related to DEHP and DiNP exposure are necessary for the children.     

Reversed association between levels of prostate specific antigen and levels of blood cadmium and urinary cadmium

Prostate cancer associated with cadmium exposure may indicate a link between prostate specific antigen (PSA) and levels of blood cadmium (BCd) and urinary cadmium (UCd). Thus, these associations were investigated. We recruited 295 men, 50 years of age and above from a health check-up program at a health center as subjects of the study. They completed a self-reported questionnaire and provided fasting samples of blood and urine for cadmium assay. The assay was performed using atomic absorption spectrophotometry. Blood samples were also collected for the assays of total cholesterol and high-density lipoprotein measures. The means of BCd and UCd increased with age and the means of all subjects were 1.19 ± 1.04 μg L⁻¹ and 1.37 ± 1.76 μg g⁻¹ creatinine, respectively. The PSA levels were positively associated with the lipid levels, but reversely associated with BCd and UCd levels. The multivariate logistic regression analysis showed that men with PSA ? 4.0 ng mL⁻¹ had an odds ratio (OR) of 0.4 (95% CI = 0.1-0.9) to have BCd > 0.49 μg L⁻¹, and an OR of 0.4 (95% CI = 0.2-1.0) to have UCd > 0.45 μg g⁻¹ creatinine. In conclusion, the PSA levels are reversely associated with BCd and UCd levels.     

China's Regional Policies:Progress of the 11~(th) Five Year Plan Period and Prospect of the 12~(th) Five Year Plan Period

During the 11th Five Year Plan period,China improved its policy system for the overall strategy of regional development,and established and completed the policies intended for the promotion of regional cooperation and interaction.Thereupon,regional development in China took on a series of positive changes such as the enhancement of coordination.During the 12th Five Year Plan period,China will fully implement and continuously improve the policy measures for development in its four major regions,strengthen differentiated guidance to different regions in line with the planning for major function-oriented zones,and accelerate the establishment of basic systems that facilitate coordinated regional development.     

流域水生态承载力研究的起源和发展

流域水生态承载力的研究是近几年来从水生态的角度解决流域可持续发展问题的有效手段。通过文献综述的方法,从流域水生态承载力的起源和发展入手,对流域水生态承载力的理论基础,与相关已有研究的区别和联系进行了探讨,并对流域水生态承载力的进一步研究进行了展望。从起源上看,承载力理论、可持续发展和生态足迹理论、流域生态学理论分别是流域水生态承载力研究的基础、落脚点和支撑。从发展上看,水生态承载力是水资源和水环境承载力的有机结合和深化。从测度和评价方法上看,第一生产者的净初级生产力方法、生态足迹法、可持续发展指标法和生态系统健康等生态承载力的测度方法为流域水生态承载力的评价奠定了基础。目前流域水生态承载力的研究尚处于初级阶段,今后不论是在理论探讨还是模型应用中均应进一步体现人类与自然和谐共存的根本目的以及水体质、量辩证统一的规律,通过物质、能量、信息、空间和时间五位一体的研究方法,使流域水生态承载力的研究更具有实践意义     

Polychlorinated naphthalenes (PCNs) in riverine and marine sediments of the Laizhou Bay area, North China

PCN congeners were analyzed in marine and riverine sediments of the Laizhou Bay area, North China. Concentrations of PCNs ranged from 0.12 to 5.1 ng g⁻¹ dry weight (dw) with a mean value of 1.1 ng g⁻¹ dw. The levels of PCNs varied largely, with industrial group approximately ten folds higher than those of the rural in riverine sediment. A strong impact by direct discharge from local factories was suggested. Similar compositional profiles were found within groups. High resemblance of compositional profiles between industrial samples and Halowax 1014 was observed. It was indicated that PCNs in riverine sediments were mainly from release of industrial usage, with additional contributions from industrial thermal process at certain sites. In marine sediments, it was suggested that PCNs along the coast of Laizhou Bay were mainly controlled by riverine input. While in the central bay, PCN distributions were possibly impacted by combined multiple factors.     

Can arbuscular mycorrhizal fungi improve grain yield, As uptake and tolerance of rice grown under aerobic conditions?

The effects of arbuscular mycorrhizal fungi (AMF) - Glomus intraradices and G. geosporum on arsenic (As) and phosphorus (P) uptake by lowland (Guangyinzhan) and upland rice (Handao 502) were investigated in soil, spiked with and without 60 mg As kg⁻¹. In As-contaminated soil, Guangyinzhan inoculated with G. intraradices or Handao 502 inoculated with G. geosporum enhanced As tolerance, grain P content, grain yield. However, Guangyinzhan inoculated with G. geosporum or Handao 502 inoculated with G. intraradices decreased grain P content, grain yield and the molar ratio of grain P/As content, and increased the As concentration and the ratio of grain/straw As concentration. These results show that rice/AMF combinations had significant (p < 0.05) effects on grain As concentration, grain yield and grain P uptake. The variation in the transfer and uptake of As and P reflected strong functional diversity in AM (arbuscular mycorrhizal) symbioses.