Inorganic Acid Emission Factors of Semiconductor Manufacturing Processes

Abstract

A huge amount of inorganic acids can be produced and emitted with waste gases from integrated circuit manufacturing processes such as cleaning and etching. Emission of inorganic acids from selected semiconductor factories was measured in this study. The sampling of the inorganic acids was based on the porous metal denuders, and samples were then analyzed by ion chromatography. The amount of chemical usage was adopted from the data that were reported to the Environmental Protection Bureau in Hsin-chu County according to the Taiwan Environmental Protection Agency regulation. The emission factor is defined as the emission rate (kg/month) divided by the amount of chemical usage (L/month). Emission factors of three inorganic acids (i.e., hydrofluoric acid [HF], hydrochloric acid [HQ], and sulfuric acid [H₂SO₄]) were estimated by the same method. The emission factors of HF and HCl were determined to be 0.0075 kg/L (coefficient of variation [CV] = 60.7%, n = 80) and 0.0096 kg/L (CV = 68.2%, n = 91), respectively. Linear regression equations are proposed to fit the data with correlation coefficient square (R²) = 0.82 and 0.9, respectively. The emission factor of H₂SO₄, which is in the droplet form, was determined to be 0.0016 kg/L (CV = 99.2%, n = 107), and its R² was 0.84. The emission profiles of gaseous inorganic acids show that HF is the dominant chemical in most of the fabricators.     

Predicting Cutoff Aerodynamic Diameter and Sharpness of Single Round-Nozzle Impactors with a Finite Impaction Plate Diameter

Abstract

This investigation numerically examined the cutoff aerodynamic diameter (da₅₀) and the sharpness (GSD) of the particle collection efficiency curve of impactors with a finite impaction plate diameter. Results revealed that the inertial impactors have a limited cutoff aerodynamic diameter at different air velocities. The extreme value of the cutoff aerodynamic diameter increases with the nozzle diameter (W)/the plate diameter (D_c). The computed da₅₀/D_c values of the impactors increase with W/D_c at various Reynolds numbers (Re) and with the nozzle-toplate distance (S)/D_c when Re is 100. The value of GSD slightly increases with W/D_c for Re of 10 and 100, although the effect of S/D_c on GSD is not evident at various Res. The particle collection efficiency curve of the impactor with a lower Re is less sharp than that with a high Re at various W/D_c and S/D_c values. Statistical equations closely fitted the obtained numerical results for Res of 10–3000. The equations are useful for directly calculating the cutoff aerodynamic diameter and the sharpness of the particle collection efficiency curve for single round-nozzle impactors with a finite impaction D_c.     

Decomposition of Gas Phase 1,3-Butadiene by Ultraviolet/Ozone Process

Abstract

A pilot-scale plug-flow reactor was built to investigate its performance in treating airborne 1,3-butadiene (BD) via ozonation (O₃) and ultraviolet (UV)/O₃ technologies. Governing factors, such as the initial molar ratio of ozone to BD, UV volumetric electric input power, and moisture content in the influent airstream, were investigated. Experiments were conducted at an influent BD concentration of ～50 ppm, an ambient temperature of 26 °C, and a gas retention time of 85 sec. Results show that an initial molar ratio of ozone to BD of 3.5 and 2 sufficed to obtain BD decompositions of >90% for ozonation and UV/O₃, respectively. The UV irradiance did not directly promote the decomposition of BD, rather, it played a role in promoting the production of secondary oxidants, such as hydroxyl radicals. Kinetic analyses indicate that both types of BD decomposition are peudo–first-order with respect to BD concentrations. Moisture content (relative humidity = 40–99%) and UV volumetric electric input power (0.147 and 0.294 W/L) are both factors that weakly affect the rate of BD decomposition. Economic evaluation factors, including both energy of ozone production and UV electric input power, were also estimated.     

Influence of particle location on the number of charges per charged nanoparticle at the outlet of a needle charger

This study has investigated numerically the influence of particle location on the number of charges per charged particle in the 10–40 nm size range at the outlet of a needle charger by simulating flow field, electric field, particle charging, and particle trajectory at various conditions. The results show that the total (i.e., diffusion + field charging) number of charges per particle increase with decreasing ratio values of radial location at the outlet of the charger due to the particle position close to the needle tip. It has also been shown that in the outlet region of the charger there is a critical radial location at which the number of charges per particle is a maximum; this critical radial location represents the point at which the charged particle trajectory becomes closest to the needle electrode. The maximum value of number of charges increases with increasing Reynolds number and slightly increases with decreasing applied voltage for particle diameter larger than 20 nm. The maximum number of charges per charged nanoparticle increases with increasing particle diameter. In addition, the minimum ratio value of radial particle location decreases with increasing Reynolds number for various particle diameters.

Implications: In this work, the influence of particle location on the number of charges per charged nanoparticle at the outlet of a needle charger has been investigated using numerical models under different conditions. The results demonstrate that the radial location affects the number of charges per particle at the outlet of the charger. The maximum number of charges increases with increasing particle diameter, and the minimum ratio value of radial particle location decreases with increasing Reynolds number. The numerical models explain and quantify the number of charges on the charged particle in the 10–40 nm size range from the outlet of the needle charger at various conditions.     

变压吸附技术的应用及其发展简述

文章分析了变压吸附技术存在的问题,并提出解决措施。通过对变压吸附技术应用现状的总结,对该技术未来的发展方向进行预测与评价。指出变压吸附技术能够经济高效地实现物质的分离,有望成为分离技术未来的发展方向,为环保和工业生产做出更大贡献。     

回收与降解聚驱采出水的工艺探讨

含聚污水的处理是困扰石油行业的难题之一。基于聚驱采出水的特点,围绕聚合物的回收利用和降解理论及技术,探讨国内外含聚污水处理技术的研究与应用现状,对比分析现有处理技术存在的问题及适应性,提出采用化学混凝、气浮和水质改性等技术来回收利用PAM(聚丙烯酰胺)的新思路,打破了降解PAM的传统思维,同时分析含聚污水处理与利用技术的可行性与应用前景,有望实现含聚污水的循环利用。     

微生物法处理海上钻井废钻井液

微生物法适用于海上钻井含油废弃物的处理。通过多次对菌株采集、分离、纯化和培养驯化,选育得到了3株对石油烃类有很好降解效果的石油类降解菌;确定了石油类降解菌适宜的生化处理条件:最佳生长及原油降解温度为50℃、最佳生长及原油降解酸碱性环境为pH=6.0、最佳菌株接种量2%、最佳原油初始浓度为500mg/L。处理后的含油废弃钻井液含油量基本稳定在2mg/L以下,降解率达98%以上。     

Cornmeal-induced resistance to ciprofloxacin and erythromycin in enterococci

Triclosan is used as an antibacterial agent in household items and personal care products. Since this compound is found in maternal milk of humans and bodies of wild animals, there is growing concern among some consumer groups and scientific community that triclosan is adverse for humans and wild animals. In order to estimate adverse actions of triclosan, the effects of triclosan on intracellular Zn²⁺ concentration and cellular thiol content were studied in rat thymocytes by the use of flow cytometer with appropriate fluorescent probes. Triclosan at 1-3 μM (sublethal concentrations) increased the intensity of FluoZin-3 fluorescence (intracellular Zn²⁺ concentration) and decreased the intensity of 5-chloromethylfluorescein (5-CMF) fluorescence (cellular thiol content). Negative correlation (r = −0.985) between triclosan-induced changes in FluoZin-3 and 5-CMF fluorescences was found. Removal of external Zn²⁺ did not significantly affect the triclosan-induced augmentation of FluoZin-3 fluorescence, suggesting an intracellular Zn²⁺ release by triclosan. These actions of triclosan were similar to those of H₂O₂ and triclosan significantly potentiated the cytotoxicity of H₂O₂. Therefore, the results may suggest that triclosan at sublethal concentrations induces oxidative stress that decreases cellular thiol content, resulting in an increase in intracellular Zn²⁺ concentration by Zn²⁺ release from intracellular store(s). Since recent studies show many physiological roles of intracellular Zn²⁺ in cellular functions, the triclosan-induced disturbance of cellular Zn²⁺ homeostasis may induce adverse actions on the cells.     

Catalytic destruction of pentachlorobenzene in simulated flue gas by a V2O5-WO3/TiO2 catalyst

Pentachlorobenzene (PeCB) in simulated flue gas was destructed by a commercial V₂O₅-WO₃/TiO₂ catalyst in this study. The effects of reaction temperature, oxygen concentration, space velocity and some co-existing pollutants on PeCB conversion were investigated. Furthermore, a possible mechanism for the oxidation of PeCB over the vanadium oxide on the catalysts was proposed. Results show that the increase of gas hourly space velocity (GHSV) and the decrease of operating temperature both resulted in the decrease of PeCB removal over the catalyst, while the effect of the oxygen content in the range of 5-20% (v/v) on PeCB conversion was negligible. PeCB decomposition could be obviously affected by the denitration reactions under the conditions because of the positive effect of NO but negative effect of NH₃. The introduction of SO₂ caused the catalyst poisoning, probably due to the sulfur-containing species formed and deposited on the catalyst surface. The PeCB molecules were first adsorbed on the catalyst surface, and then oxidized into the non-aromatic acyclic intermediates, low chlorinated aromatics and maleic anhydride.     

Historical change of mercury pollution in remote Yongle archipelago, South China Sea

We collected three ornithogenic coral sand sedimentary profiles from Jinyin Island, Jinqing Island and Guangjin Island of Yongle archipelago, South China Sea and reconstructed the deposition flux of anthropogenic Hg over the past 700 years in the study area. On the whole, the anthropogenic Hg flux is relatively low; it remained at a low level before the Industrial Revolution with a small peak at about 1450-1550 AD, which may record the enhanced metallurgy activity in Ming Dynasty of China. During the 20th century, the deposition flux of anthropogenic Hg increased rapidly, but two troughs occurred during the periods around 1940s and 1970s, corresponding to the economic depression caused by World War II, Civil War in China (1945-1949), and the Culture Revolution (1966-1976) in China. Since the 1970s the deposition flux of anthropogenic Hg has been persistently increasing, apparently the result of fast economic development in East and Southeast Asia countries around South China Sea.