Abatement of sulfur hexafluoride emissions from the semiconductor manufacturing process by atmospheric-pressure plasmas

Sulfur hexafluoride (SF6) is an important gas for plasma etching processes in the semiconductor industry. SF6 intensely absorbs infrared radiation and, consequently, aggravates global warming. This study investigates SF6 abatement by nonthermal plasma technologies under atmospheric pressure. Two kinds of nonthermal plasma processes--dielectric barrier discharge (DBD) and combined plasma catalysis (CPC)--were employed and evaluated. Experimental results indicated that as much as 91% of SF6 was removed with DBDs at 20 kV of applied voltage and 150 Hz of discharge frequency for the gas stream containing 300 ppm SF6, 12% oxygen (O2), and 40% argon (Ar), with nitrogen (N2) as the carrier gas. Four additives, including Ar, O2, ethylene (C2H4), and H2O(g), are effective in enhancing SF6 abatement in the range of conditions studied. DBD achieves a higher SF6 removal efficiency than does CPC at the same operation condition. But CPC achieves a higher electrical energy utilization compared with DBD. However, poisoning of catalysts by sulfur (S)-containing species needs further investigation. SF6 is mainly converted to SOF2, SO2F4, sulfur dioxide (SO2), oxygen difluoride (OF2), and fluoride (F2). They do not cause global warming and can be captured by either wet scrubbing or adsorption. This study indicates that DBD and CPC are feasible control technologies for reducing SF6 emissions.     

Simultaneous removal of nitrogen oxide/nitrogen dioxide/sulfur dioxide from gas streams by combined plasma scrubbing technology

Oxides of nitrogen (NOx) [nitrogen oxide (NO) + nitrogen dioxide (NO2)] and sulfur dioxide (SO2) are removed individually in traditional air pollution control technologies. This study proposes a combined plasma scrubbing (CPS) system for simultaneous removal of SO2 and NOx. CPS consists of a dielectric barrier discharge (DBD) and wet scrubbing in series. DBD is used to generate nonthermal plasmas for converting NO to NO2. The water-soluble NO2 then can be removed by wet scrubbing accompanied with SO2 removal. In this work, CPS was tested with simulated exhausts in the laboratory and with diesel-generator exhausts in the field. Experimental results indicate that DBD is very efficient in converting NO to NO2. More than 90% removal of NO, NOx, and SO2 can be simultaneously achieved with CPS. Both sodium sulfide (Na2S) and sodium sulfite (Na2SO3) scrubbing solutions are good for NO2 and SO2 absorption. Energy efficiencies for NOx and SO2 removal are 17 and 18 g/kWh, respectively. The technical feasibility of CPS for simultaneous removal of NO, NO2, and SO2 from gas streams is successfully demonstrated in this study. However, production of carbon monoxide as a side-product (approximately 100 ppm) is found and should be considered.     

Polychlorinated dibenzo-p-dioxins and dibenzofurans from food salt samples processed by heat treatment in Korea

Eight samples of processed food salt collected from five plants in Korea were analyzed for 2,3,7,8-substituted polychlorinated dibenzo-p-dioxins (PCDDs) and polychlorinated dibenzofurans (PCDFs) using liquid-liquid extraction, clean-up procedures, and high resolution gas chromatography-high resolution mass spectrometry. The study included the analyses of two kinds of salt product sample: bamboo-salt and parched salt. The levels of toxic PCDD/Fs found in the salt product samples were extremely low: the results revealed TEQ levels ranging between the sub pg TEQ/g and sub fg TEQ/g. The differences in the TEQ values of toxic PCDD/F were observed between the salt product samples, which were treated with different frequency of baking using four different fuels (firewood, pine wood, pine resin, and indirect heating by gas) at temperatures from 300 to 2000 degrees C. In bamboo-salt samples, the concentrations and TEQ values of toxic PCDD/Fs ranged between 0.57-66 pg/g and 5.7x10(-5)-0.64 pg TEQ/g, respectively. PCDD/Fs levels in bamboo-salts baked by firewood were found to be higher than those baked by pinewood or pine resin. In parched salt samples, the concentrations and TEQ values of toxic PCDD/Fs ranged between 0.97-3.7 pg/g and 0.0097-0.017 pg TEQ/g, respectively. The data was discussed regarding the concentration and the distribution pattern of congeners.     

The Predatory Bird Monitoring Scheme: identifying chemical risks to top predators in Britain

The Predatory Bird Monitoring Scheme (PBMS) is a long term (>40 y), UK-wide, exposure monitoring scheme that determines the concentration of selected pesticides and pollutants in the livers and eggs of predatory birds. This paper describes how the PBMS works, and in particular highlights some of the key scientific and policy drivers for monitoring contaminants in predatory birds and describes the specific aims, scope, and methods of the PBMS. We also present previously unpublished data that illustrates how the PBMS has been used to demonstrate the success of mitigation measures in reversing chemical-mediated impacts; identify and evaluate chemical threats to species of high conservation value; and finally to inform and refine monitoring methodologies. In addition, we discuss how such schemes can also address wider conservation needs.     

Occurrence of phthalates in sediment and biota: relationship to aquatic factors and the biota-sediment accumulation factor

Phthalate compounds in sediments and fishes were investigated in 17 Taiwan's rivers to determine the relationships between phthalate levels in sediment and aquatic factors, and biota-sediment accumulation factor (BSAF) for phthalates. Mean concentrations (range) of di(2-ethylhexyl) phthalate (DEHP), butyl benzyl phthalate (BBzP) and di-n-butyl phthalate (DBP) in sediment at low-flow season were 4.1 (<0.05-46.5), 0.22 (<0.05-3.1) and 0.14 (<0.05-1.3)mgkg(-1)dw; those at high-flow season were 1.2 (<0.05-13.1), 0.13 (<0.05-0.27) and 0.09 (<0.05-0.22)mgkg(-1)dw, respectively. Trace levels of dimethyl phthalate (DMP), diethyl phthalate (DEP) and di-n-octyl phthalate (DOP) in sediment were found in both seasons. Concentrations of DEHP in sediments were significantly affected by temperature, suspended solids, ammonia-nitrogen, and chemical oxygen demand. The highest concentration of DEHP in fish samples were found in Liza subviridis (253.9mgkg(-1)dw) and Oreochromis miloticus niloticus (129.5mgkg(-1)dw). BSAF of DEHP in L. subviridis (13.8-40.9) and O. miloticus niloticus (2.4-28.5) were higher than those in other fish species, indicating that the living habits of fish and physical-chemical properties of phthalates, like logKow, may influence the bioavailability of phthalates in fish. Our data suggested that DEHP level in river sediments were influenced by water quality parameters due to their effects on the biodegradation processes, and that the DEHP level in fish was affected by fish habitat and physiochemical properties of polluted contaminants.     

Ozonation of pentachlorophenol in unsaturated soils

A heterogeneous model was developed to describe interactions between ozone and hydrophobic organic compounds, exemplified by pentachlorophenol, in highly gas-saturated vadose zones where water moisture was limited to a thin film on soil particle surfaces. The soil was assumed to be free of soil organic matter. The model included a set of transient equations considering diffusion with simultaneous chemical reaction and hydrophobic partitioning. From dimensionless analysis, it was found that the film concentrations of ozone and the hydrophobic organic component were dependent on the Damk?hler numbers. Effects of Damk?hler numbers on the film profiles of components were examined. With the interfacial flux of ozone calculated from film profiles, dimensionless governing equations of ozone transport and contaminant removal across an experimental column were established. These equations were dependent on the Stanton number. One-dimensional column experiments were conducted to test the model. The optimal time for flow rate adjustment during the process was approximated. Finally, effects of ozone velocity and ozone gas concentration on the Stanton number were evaluated.     

Photocatalytic oxidation of gas-phase elemental mercury by nanotitanosilicate fibers

Photocatalytic fibers were generated from the continuous evaporation of titanium tetraisopropoxide with tetraethyl orthosilicate through a flame burner. The morphology, the crystal form, and the components of the nanotitanosilicate fibers were analyzed by Raman spectroscopy, Field emission-scanning electron microscope, X-ray diffraction, and Brunauer-Emmett-Teller surface area analysis. The nanotitanosilicates prepared by three different carrier gases (air, N(2), and Ar) were tested for their photocatalytic ability to remove/oxidize gas-phase elemental mercury. Under UV black light, the Hg(0) capture efficiencies were 78%, 86%, and 85% for air, N(2), and Ar, respectively. For air, the value was close to 90%, even under household fluorescent light. The Hg(0) capture efficiency by nanotitanosilcate was measured under fluorescent light, UV black light, and sunlight.     

Oxidation of elemental mercury using atmospheric pressure non-thermal plasma

The oxidation of gas phase elemental mercury (Hg0) by atmospheric pressure non-thermal plasma has been investigated at room temperature, employing both dielectric barrier discharge (DBD) of the gas mixture of Hg0 and injection of ozone (O3) into the gas mixture of Hg0. Results have shown that the oxidative efficiencies of Hg0 by DBD and the injection of O3 are 59% and 93%, respectively, with energy consumption of 23.7 J L(-1). This combined approach has indicated that O3 plays a decisive role in the oxidation of gas phase Hg0. Also the oxidation of Hg0 by injecting O3 into the gas mixture of Hg0 proceeds with better efficiency than DBD of the gas mixture of Hg0. These results have been explained by the incorporation of the competitive reaction pathways between the formation of HgO by O3 and the decomposition of HgO back to Hg0 in the plasma environment.     

Numerical simulation of an array of fences in Saemangeum reclaimed land

This paper discusses about the quantitative effect of windbreak fences on wind velocity in the reclaimed land at Saemangeum in South Korea. Windbreak fences were constructed in the reclaimed land to reduce the wind velocity to prevent the generation and diffusion of dust. However, up to this time, no in-depth studies were conducted to quantitatively measure the effect of the windbreak fences on wind velocity thus an optimum windbreak structure is not yet determined. Using CFD simulations, the effects of fence porosity, fence height, and the distance between the adjacent fences were investigated. A wind tunnel experiment was initially conducted and data gathered were used to develop the CFD models. From the experiments and CFD simulations, the overall percentage difference of the measured velocities was 7.20% which is generally acceptable to establishing the reliability of the CFD models. The reduction effect on wind velocity was measured in between the adjacent fences up to a height of 0.6 m from the ground surface. In terms of porosity ( = 0, 0.2, 0.4, 0.6), 0.2 was found to be the optimum value. Conversely, the effect of fence height (0.6, 0.8 and 1.0 m) showed no significant difference; therefore, 0.6 m height is recommended. In addition, the reduction effect of distance between the adjacent fences (2, 4 and 6 m) on wind velocity having a 0.2 porosity has decreased to about 75% regardless of the distance. In the case of the reclaimed land in Saemangeum, a decrease of 75% can prevent the generation and diffusion of dusts. However, the source of dusts is very large. Therefore, constructing an array of windbreak with 6 m distance between them is deemed necessary.     

Comparison of organic compositions in dust storm and normal aerosol samples collected at Gosan,Jeju Island,during spring 2005

To better understand the current physical and chemical properties of East Asian aerosols, an intensive observation of atmospheric particles was conducted at Gosan site, Jeju Island, South Korea during 2005 spring. Total suspended particle (TSP) samples were collected using pre-combusted quartz filters and a high-volume air sampler with the time intervals ranging from 3 h to 48 h. The kinds and amount of various organic compounds were measured in the samples using gas chromatography–mass spectrometry. Among the 99 target compounds detected, saccharides (average, 130 ± 14 ng m^?3), fatty acids (73 ± 7 ng m^?3), alcohols (41 ± 4 ng m^?3), n-alkanes (32 ± 3 ng m^?3), and phthalates (21 ± 2 ng m^?3) were found to be major compound classes with polyols/polyacids, lignin and resin products, PAHs, sterols and aromatic acids being minor. Compared to the previous results reported for 2001 late spring samples, no significant changes were found in the levels of their concentrations and compositions for 4 years, although the economy in East Asia, especially in China, has sharply expanded from 2001 to 2005. During the campaign at Gosan site, we encountered two distinct dust storm episodes with high TSP concentrations. The first dust event occurred on March 28, which was characterized by a predominance of secondary organic aerosols. The second event that occurred on the next day (March 29) was found to be characterized by primary organic aerosols associated with forest fires in Siberia/northeastern China. A significant variation in the molecular compositions, which was found within a day, suggests that the compositions of East Asian aerosols are heterogeneous due to multi-contributions from different source regions together with different pathways of long-range atmospheric transport of particles.