Abatement of sulfur hexafluoride emissions from the semiconductor manufacturing process by atmospheric-pressure plasmas

Sulfur hexafluoride (SF6) is an important gas for plasma etching processes in the semiconductor industry. SF6 intensely absorbs infrared radiation and, consequently, aggravates global warming. This study investigates SF6 abatement by nonthermal plasma technologies under atmospheric pressure. Two kinds of nonthermal plasma processes--dielectric barrier discharge (DBD) and combined plasma catalysis (CPC)--were employed and evaluated. Experimental results indicated that as much as 91% of SF6 was removed with DBDs at 20 kV of applied voltage and 150 Hz of discharge frequency for the gas stream containing 300 ppm SF6, 12% oxygen (O2), and 40% argon (Ar), with nitrogen (N2) as the carrier gas. Four additives, including Ar, O2, ethylene (C2H4), and H2O(g), are effective in enhancing SF6 abatement in the range of conditions studied. DBD achieves a higher SF6 removal efficiency than does CPC at the same operation condition. But CPC achieves a higher electrical energy utilization compared with DBD. However, poisoning of catalysts by sulfur (S)-containing species needs further investigation. SF6 is mainly converted to SOF2, SO2F4, sulfur dioxide (SO2), oxygen difluoride (OF2), and fluoride (F2). They do not cause global warming and can be captured by either wet scrubbing or adsorption. This study indicates that DBD and CPC are feasible control technologies for reducing SF6 emissions.     

Catalytic gasification of coal using eutectic salts: recovery,regeneration, and recycle of spent eutectic catalysts

Catalyst recovery studies were conducted for gasified chars produced from steam gasification of Illinois #6 coal catalyzed with two different catalyst systems. A ternary (43.5 mol% Li2CO3-31.5 mol% Na2COr-25 mol% K2CO3) and a binary (29 mol% Na2CO3-71 mol% K2CO3) eutectic catalyst system were used for gasifying coal. Various extraction schemes, such as water extraction, H2SO4 extraction, and acetic acid extraction, were evaluated with respect to their extraction efficiencies. Effects of major process variables, such as solvent-to-char ratio, mixing time, temperature, and concentration, on the extraction efficiency were evaluated. A process schematic for the entire catalyst recovery, regeneration, and recycle scheme was developed and the preliminary process economics were determined based on these extraction schemes. H2SO4 extraction was found to be the most desirable. It also turned out to be more attractive than a once-through throwaway system.     

含重金属水处理污泥的固化和浸出毒性研究

工业危险固体废物在进行安全填埋前需要进行固化稳定处理。针对电镀厂和皮革厂含重金属的水处理污泥 ,用不同比例的水泥、粉煤灰进行固化稳定处理。考虑酸雨环境 ,浸出实验采用TCLP标准。电镀厂污泥单独固化时 ,其浸出液中铜离子浓度由 78 0mg/L下降到 1 5mg/L ;镍离子浓度由 2 2 4 5mg/L下降到 2 2 2mg/L ,高于危险废物允许进入填埋区 15mg/L的控制限值。电镀厂污泥与皮革厂污泥混合后固化 ,浸出液毒性明显降低。铜离子的浸出浓度降低到1 98mg/L ,镍离子降低到 4 10mg/L ,总铬降低到 0 4 0mg/L ,各项指标均低于国家危险废物允许进入填埋区的控制限值 ,可安全填埋。     

Wet air oxidation of a reactive dye solution using CoAlPO(4)-5 and CeO(2) catalysts

Wet air oxidation of a prepared reactive dye solution was performed to assess the efficacy of CoAlPO(4)-5 and CeO(2) as catalysts in the reaction. Via adsorption and oxidation of dye, CoAlPO(4)-5 effectively decreased American Dye Manufacturers Institute and chemical oxygen demand (COD) values in the dye solution. At a reaction temperature of 135 degrees C and an applied pressure of 1.0 MPa, color and COD removal were as high as 95% and 90%, respectively, after 2 h. Active sites on the outer surface of CoAlPO(4)-5 are responsible for adsorption and decomposition of dye while active sites in the pores dominate further destruction and oxidation of intermediate products. Since the outer surface only represents a minor part of the total surface, the color removal does not increase appreciably with loading of CoAlPO(4)-5. The CeO(2) catalyst, calcined from cerium chloride under high thermal impact (type A CeO(2)) was very effective in removing color and COD from the solution. This catalyst demonstrated near 100% color removal at temperatures above 135 degrees C and the COD removal could be above 95% at 165 degrees C. With both CoAlPO(4)-5 and CeO(2) catalysts, COD rose and then fell back during the reaction, a feature typical of a consecutive reaction. In contrast to prepared CeO(2), a commercial CeO(2) did not exhibit any catalytic ability for the removal of color and COD. The durability of both CoAlPO(4)-5 and prepared CeO(2) is considered to be fair.     

利用底栖动物研究京杭运河徐州段的水质变化

通过分析京杭运河徐州段4个断面底栖动物的种类、密度，及生物多样性指数的变化来研究京杭运河徐州段水质的变化趋势。     

包裹块石煤固氟燃料制备工艺研究

石灰或烧制白云岩与粘土、低氟无烟煤粉作为包裹材料，通过正交试验方法，对陕西省紫阳县蒿坪镇高氟块状石煤进行了固氟效果研究。结果表明，影响包裹石煤固氟效果的主要因素是无烟煤粉和石灰，影响顺序是无烟煤粉〉石灰〉粘土。最佳制备工艺条件为石煤块：无烟煤粉：石灰：粘土=70：10：10：5，固氟率达91．9％。     

Influence of metal oxides on PCDD/Fs formation from pentachlorophenol

Chlorophenols (ClPhs) are considered as important precursors for PCDD/Fs formation. The influences of series of metal oxides including MgO, Al2O3, CaO, BaO, TiO2, V2O5, MnO2, Fe2O3, Co3O4, CuO, Ag2O, ZnO, HgO, SnO, PbO, La2O3, CeO2, and Eu2O3 on PCDD/Fs formation from pentachlorophenol (PCP) were investigated in a laboratory-scale reactor. The results indicated that most of the above metal oxides have obvious suppressing effects on the total amount of PCDD/Fs formation from precursor PCP except for CuO, ZnO, MnO2, TiO2 and Co3O4 with promotion effects at 280 degrees C for 2 h. Although MgO, Al2O3, Fe2O3, PbO, La2O3 and Eu2O3 could reduce the amount of octachlorinated dibenzo-p-dioxin (OCDD), they promote the formation of more toxic 1,2,3,4,6,7,8-HpCDD at the same time. The total suppressing efficiencies of several metal oxides including CaO, BaO, PbO, Ag2O, HgO and SnO which have lower Z/r (charge to radius ratio) <2 are all over 90%. The theories of generalized acid-base and atomic parameter (Z/r) were used to speculate the effecting mechanisms. The factors including time and temperature on suppressing efficiencies of CaO, BaO and PbO have also been studied in the present paper. The results showed that the total suppressing efficiencies of CaO, BaO and PbO increase with the increase of heated time and temperature.     

固相微萃取气相色谱法测定水样中的苯胺、吡啶

应用PDMS/DVB固相微萃取探头,结合GC/FID测定水中的苯胺、吡啶.优化了萃取温度、萃取平衡时间、pH等条件.该方法对苯胺和吡啶的检测限分别为0.050、0.065 mg/L,相对标准偏差6.44%～8.67%,具有快速、准确和方便等优点.     

雌酮在铁(Ⅲ)-草酸盐配合物体系中的光降解

以125 W高压汞灯为光源,研究了水中雌酮(E1)在铁(Ⅲ)-草酸盐体系中的光降解;考察了初始pH值、铁(Ⅲ)/草酸盐配比、E1初始浓度对E1光降解的影响.结果表明,铁(Ⅲ)/草酸盐体系能引发E1的光降解.在pH=3.5,Fe(Ⅲ)/Ox配比为10/120μmol/L时,2 mg/L E1光照160 min可以降解59%.在pH 3～6范围内,pH为3～4时E1降解效率最高;在2～10 mg/L范围内,光降解效率随水溶液中E1初始浓度的增加而降低.     

曝气生物滤池处理焦化废水脱氮的研究

用曝气生物滤池处理焦化废水的研究表明,在曝气量(Q)=0.25L/min,温度(T)=20℃,pH=8,反冲洗周期为3个运行周期内,NH3-N的去除速率达44 mg/L·h.同时在滤池中出现了亚硝酸盐积累现象,且受反冲洗的影响较大.