Total toxicity equivalents emissions of SF6, CHF3, and CCl2F2 decomposed in a RF plasma environment

Sulfur hexafluorine compound (SF6), trifluoromethane (CHF3) and diclorodifluoromethane (CCl2F2) are extensively used in the semiconductor industry. They are global warming gases. Most studies have addressed the effective decomposition of fluorine compounds, rather than the toxicity of decomposed by-products. Hence, the concepts of toxicity equivalents (TEQs) were applied in this work. The results indicated that HF and SiF4 were the two greatest contributors of TEQ to the SF6/H2/Ar plasma system, while F2 and SiF4 were the two greatest contributors to the SF6/O2/Ar system. Additionally, SiF4 and HF were the two greatest contributors of TEQ to both the CHF3/H2/Ar and CHF3/O2/Ar plasma systems. HF and HCl were the two greatest contributors of TEQ to the CCl2F2/H2/Ar plasma system, and Cl2 and COCl2 were the two greatest contributors to the CCl2F2/O2/Ar system. HCl and HF can be recovered using wet scrubbing, which reduces the toxicity of these emission gases. Consequently, the hydrogen-based plasma system was a better alternative for treating gases that contained SF6, CHF3 and CCl2F2 from the TEQs point of view.     

Effects of experimental parameters on NF(3) decomposition fraction in an oxygen-based RF plasma environment

Clean procedure is one of the major emitters of perfluorinated compounds (PFCs) in semiconductor manufacturing. Nitrogen trifluoride (NF(3)) is increasingly the process gas of choice for eliminating PFC emissions. However, its toxic to human and similar global warming potential compared to most other PFCs made NF(3) warranted much more investigation. This study demonstrated a radio-frequency plasma system for decomposing NF(3). The effects of experimental parameters: input power, O(2)/NF(3) ratio, operational pressure and NF(3) feeding concentration on NF(3) decomposition fraction (eta(NF3)) and energy efficiency E(NF3) were examined in detail. The analytical results demonstrated that the NF(3) was almost completely decomposed (>99%) at input power=30W, [NF(3)](in)=1.0% and eta(NF3) increased with input power. However, adding O(2) to the system inhibited NF(3) decomposition and decreased E(NF3). Moreover, eta(NF3) and E(NF3), decreased with gradually increasing operational pressure. Notably, increasing the NF(3) feeding concentration increased molecule density, reducing eta(NF3), but increasing E(NF3). Furthermore, the products detected in the NF(3)/O(2)/Ar plasma system were NO(2), NO, N(2)O, SiF(4), N(2) and F(2). Potential reaction pathways in the oxygen-based NF(3) plasma environment were built-up and elucidated.     

A pilot study for determining the optimal operation condition for simultaneously controlling the emissions of PCDD/Fs and PAHs from the iron ore sintering process

In this study, the cost-benefit analysis technique was developed and incorporated into the Taguchi experimental design to determine the optimal operation combination for the purpose of providing a technique solution for controlling both emissions of PCDD/Fs and PAHs, and increasing both the sinter productivity (SP) and sinter strength (SS) simultaneously. Four operating parameters, including the water content, suction pressure, bed height, and type of hearth layer, were selected and all experimental campaigns were conducted on a pilot-scale sinter pot to simulate various sintering operating conditions of a real-scale sinter plant. The resultant optimal combination could reduce the total carcinogenic emissions arising from both emissions of PCDD/Fs and PAHs by 49.8%, and increase the sinter benefit associated with the increase in both SP and SS by 10.1%, as in comparison with the operation condition currently used in the real plant. The ANOVA results indicate that the suction pressure was the most dominant parameter in determining the optimal operation combination. The above result was theoretically plausible since the higher suction pressure provided more oxygen contents leading to the decrease in both PCDD/F and PAH emissions. But it should be noted that the results obtained from the present study were based on pilot scale experiments, conducting confirmation tests in a real scale plant are still necessary in the future.     

Effects of emulsified asphalt on the mechanical properties of granulation of calcium fluoride sludge

Journal of Material Cycles and Waste Management - To reduce the landfill volume of waste CaF2 sludge, artificial fluorite bulk (AFB) is granulated by blending CaF2 sludge and emulsified asphalt...     

沉湖钻孔沉积物中微生物脂肪酸特征与意义

利用微生物脂肪酸甲酯分析技术研究了江汉平原沉湖湖心滩G1与湖岸G2两沉积柱中微生物群落结构的垂直分布特征及其环境指示意义.结果表明：微生物脂肪酸含量与特征脂肪酸分布特征在浅层（<5m）波动较大,且与深层（5~20m）差异明显;好氧细菌、一般厌氧细菌与革兰氏阳性菌占主要优势,其相对丰度高出深层约一倍.G1位点偏还原环境,其硫酸盐还原菌及其他厌氧细菌的相对丰度与环境胁迫压力（Trans/Cis）均高于G2;与溶氧相关的环境因子,如粒径、深度等是影响其微生物群落组成的关键因子.G2位点水动力条件较强,脂肪酸总量与好氧微生物的相对优势均高于G1,而深层沉积物中总氮、N/P偏低,微生物群落组成主要受碳氮营养源,特别是氮含量的影响.为评估人类活动带来的氮磷污染对湖泊深层微生物的影响提供新的认识.     

Levels of polybrominated diphenyl ethers (PBDEs) in breast milk from central Taiwan and their relation to infant birth outcome and maternal menstruation effects

In utero exposure to polybrominated diphenyl ethers (PBDEs) reduces the number of ovarian follicles in rat females and causes permanent effects on rat males. Little data have been gathered on the associations between PBDEs exposure and birth outcome and female menstruation characteristics in both epidemiological and animal studies. The aim of this study was to examine how PBDEs in breast milk are associated with infant birth outcome and maternal menstruation characteristics. Study participants were healthy women recruited from central Taiwan between December 2000 and November 2001. Twelve congener levels of PBDEs (BDE-17, 28, 47, 66, 85, 99, 100, 138, 153, 154, 183, 209) in 20 breast milk samples were measured by gas chromatography with high resolution mass spectrometer. The mean level of PBDEs in breast milk was 3.93+/-1.74 ng/g lipid. The estimated PBDE daily intake for a breastfed infant was 20.6 ng/kg b.w./day after delivery. After maternal age, pre-pregnant BMI, and parity were adjusted, increased PBDEs in breast milk was related with decreased birth outcome, particularly for birth weight and length, chest circumference, and Quetelet's index of infants. No significant differences in PBDEs were found between the two groups of menstrual cycle length higher and lower than 30 days after we adjusted for maternal age, pre-pregnant BMI, and parity. In utero exposure to low doses of PBDEs may result in lower birth weight and short or birth length. Our findings are limited based on the low doses of PBDEs and the small sampling size.     

Size and seasonal distributions of airborne bioaerosols in commuting trains

Aerobiological studies in commuting trains in northern Taiwan were carried out from August, 2007 until July, 2008. Two six-stage (>7 μm, 4.7～7 μm, 3.3～4.7 μm, 2.1～3.3 μm, 1.1～2.1 μm, 0.65～1.1 μm) cascade impactors of 400 orifices were used to collect viable bacteria and fungi, respectively. The levels of carbon monoxide (CO), carbon dioxide (CO₂), formaldehyde (HCHO), temperature, and relative humidity in the commuting trains were also recorded during the sampling period. Results show that bacterial concentrations ranged from 25 to 1530 CFU m^?3, and averaged 417 CFU m^?3. The fungal concentrations ranged from 45 to 1906 CFU m^?3, and averaged 413 CFU m^?3. Additionally, the highest fractions occurred in the fifth stage (1.1～2.1 μm) for both bacteria and fungi. The respirable fractions, R_b and R_f, for bacteria and fungi were 62.8% and 81.4%, respectively, which are higher than those in other studies. Furthermore, the bacterial concentration reached its highest level in autumn, and its lowest level in winter. However, the fungal concentration was highest in spring and lowest in winter. Though the total bacterial or fungal concentration did not exceed the recommendation standard in Taiwan, the relatively high respirable fraction in commuting trains probably implies a higher adverse health risk for sensitive commuters. This study further conducted multiple regression analysis to determine the relationship of various stage fractions of airborne bacteria and fungi with indoor air pollutants (CO and HCHO) and environmental parameters (CO₂, temperature, and relative humidity). The correlation coefficients of multiple regression analysis for total bacteria and fungi concentrations with indoor air pollutants and environmental parameters were 0.707 (p < 0.00376) and 0.612 (p < 0.00471), respectively. There are currently no formally regulated laws for indoor air quality (IAQ) in Taiwan, and this preliminary study can provide references to the Taiwan government on IAQ management.