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1.
An experimental investigation into micro ball end-milling of silicon   总被引:1,自引:0,他引:1  
Silicon is a representative operational material for semiconductor and micro-electronics. In certain MEMS applications, it is required to fabricate three dimensional channels and complex pattern on silicon substrate. Such features are typically fabricated by photolithography and chemical etching. These processes have low productivity and have certain other limitations. Therefore, a viable switch-over from non-traditional fabrication processes to traditional machining is highly desired for improved productivity in high-mix low-volume production. However, machining of silicon by traditional process is extremely difficult due to its high brittleness. Even very small forces produced during machining can cause brittle fracture on silicon surface resulting in deteriorated surface quality. The fundamental principle in machining of a brittle material such as silicon is to achieve material removal through plastic deformation rather than crack propagation. This paper presents the experimental results of ductile-mode machining of silicon by micro ball end-milling. The workpiece surface was inclined to the rotational axes of the cutter to improve the surface finish. It was established experimentally that 15-μm deep, fracture-free slots can be machined on silicon wafer by micro ball end-milling if the feed rate is below a certain threshold. The influence of several machining parameters on the roughness of machined-surface was also investigated. Cubic boron nitride (CBN) is presented as much economical alternative tool-material to single-crystal diamond for machining silicon in ductile-mode.  相似文献   
2.
In order to find effective measures to control diatom blooms, a better understanding of the physiological characteristics of nutrient uptake in diatoms is needed. A study of P and Si-uptake kinetics for diatom species from two light regimes was conducted at low (LL), moderate (ML) and high light intensities (HL) (2, 25 and 80 μmol photons/(m2·sec)), respectively. The results showed that P uptake of diatoms was heavily influenced by historic light regimes. P affinity changed with growth and photosynthetic activity. The lowest half saturation constant for P uptake (Km(P)) was under HL for high-light adapted diatoms while the lowest half-saturation constant for low-light adapted diatoms was observed under LL. The Si half-saturation constant (Km(Si)) increased with increasing light intensities for pennate diatoms but decreased for centric diatoms. Diatom volumes were correlated with the maximum Si uptake rates (Vm(Si)) at HL and Km(Si) at ML and HL for six diatom species. Our results imply that when we assess the development of diatom blooms we should consider light intensity and cell volume in addition to ambient Si or P concentration. The relationship between light intensity and P-uptake suggests that we can find suitable methods to control diatom blooms on the basis of reducing phytoplankton activity of P-uptake and photosynthesis simultaneously.  相似文献   
3.
The use of higher dosage and repeated applications of conventional pesticides have led to the rapid development of insect resistance to pesticide and adverse effects on human health and environment. Accordingly, researchers are prompted to identify an alternative entomotoxic agent for crop protection. Nanocides are being considered as alternatives to conventional insecticides because they are expected to lessen the application rate and reduce the chances of resistance development in pests. In this study, we evaluated the entomotoxic effects of nanosilica on larvae of Plutella xylostella, in a laboratory by using dust spray, larva dipping, leaf dipping, and solution spray methods. Dust treatment showed a more highly significant effect than the other three treatments. The mortality percentage increased up to 58% and 85% at 24 and 72 h after treatment, respectively, when nanosilica was applied at a rate of 1 mg cm?2. In all four bioassays, mortality rate increased with both increased time after nanosilica exposure and increased concentration. Light microscopy and scanning electron microscopy images showed that larval death was due to desiccation, body wall abrasion, and spiracle blockage. These results suggested that nanosilica can be an alternative to conventional pesticides if dust formulation would be properly used.  相似文献   
4.
Silicon(111) and Silicon(100) were employed for fabrication of TiO2 films by metal organic chemical vapor deposition( MOCVD).Titanium(Ⅳ) isopropoxide(Ti[O(C3H7)4]) was used as a precursor. The as-deposited TiO2 films were characterized with FE-SEM, XRD and AFM. The photocatalytic properties were investigated by decomposition of aqueous Orange Ⅱ. And UV-VlS photospectrometer was used for checking the absorption characteristics and photocatalytic degradation activity. The crystalline and structural properties of TiO2 film had crucial influences on the photodegradation efficiency. For MOCVD in-situ deposited films on Si substrates, the photoactivities varied following a shape of “M”: at Iower(350℃ ), middle(500℃ ) and higher(800℃ ) temperature of deposition, relative lower photodegradation activities were observed. At 400% and 700% of deposition, relative higher efficiencies of degradation were obtained, because one predominant crystallite orientation could be obtained as deposition at the temperature of two levels, especially a single anatase crystalline TiO2 film could be obtained at 700℃.  相似文献   
5.
Homogeneous and vertically aligned silicon nanowires (SiNWs) were successfully fabricated using silver assisted chemical etching technique. The prepared samples were characterized using scanning electron microscopy, transmission electron microscopy and atomic force microscopy. Photocatalytic degradation properties of graphene oxide (GO) modified SiNWs have been investigated. We found that the SiNWs morphology depends on etching time and etchant composition. The SiNWs length could be tuned from 1 to 42 µm, respectively when varying the etching time from 5 to 30 min. The etchant concentration was found to accelerate the etching process; doubling the concentrations increases the length of the SiNWs by a factor of two for fixed etching time. Changes in bundle morphology were also studied as function of etching parameters. The SiNWs diameter was found to be independent of etching time or etchant composition while the size of the SiNWs bundle increases with increasing etching time and etchant concentration. The addition of GO was found to improve significantly the photocatalytic activity of SiNWs. A strong correlation between etching parameters and photocatalysis efficiency has been observed, mainly for SiNWs prepared at optimum etching time and etchant concentrations of 10 min and 4:1:8. A degradation of 92% was obtained which further improved to 96% by addition of hydrogen peroxide. Only degradation efficiency of 16% and 31% has been observed for bare Si and GO/bare Si samples respectively. The obtained results demonstrate that the developed SiNWs/GO composite exhibits excellent photocatalytic performance and could be used as potential platform for the degradation of organic pollutants.  相似文献   
6.
Multitracers were used to study water mixing in the Paraíba do Sul River estuary region in August 2007 (dry season) and March 2008 (rainy season) and to evaluate the reach of the river plume in the direction of the open ocean. Two sampling campaigns were carried out, each in a different season. Based on these results, it was possible to conclude that the multitracers used in this study (salinity, Si, Ba and U, as well as the radium isotopes 223Ra, 224Ra, 226Ra and 228Ra) presented satisfactory results toward defining the plume reach and determining the residence time and water-mixing processes in the estuary. A strong correlation was observed between tracers and the distance to the coast. During the low river water discharge period, the riverine water took about 10 days to reach open ocean waters (salinity ∼ 35). During the rainy period this value decreased to 6 days. Based on the radium results, it was possible to calculate diffusion coefficients (Kh) of 23 km2 d−1 and 38 km2 d−1 for 224Ra and 223Ra, respectively, during the dry season (winter). Values of 65 km2 d−1 and 68 km2 d−1 for 223Ra and 224Ra, respectively, were found for the rainy period (summer).  相似文献   
7.
The dust explosion committee of the Association of Powder Process Industry and Engineering, Japan recently established two testing standards for dust explosions. In the investigations for the standardization, many experimental data have been obtained for the dusts currently used in Japanese industries. Data for zirconium, tantalum and silicone dusts are presented to discuss the use of test methods, which have been accepted internationally. The test methods for dust explosions have to consider a variety of kinds and forms of dusts to be tested.  相似文献   
8.
总结了半透膜被动采样器(SPMDs)、极性有机化合物整合采样器(POCIS)、化学捕收器(Chemcatcher)和硅橡胶被动采样器(Silicon rubber)几种常用被动采样器的结构组成、应用模型、原理、样品的前处理、影响因素及应用范围,指出几种被动采样技术应用上存在的问题,并对其应用前景进行总结和展望。  相似文献   
9.
研究以单元素标准膜为基础,结合NIST SRM 2783颗粒物滤膜标准样品,建立了波长色散-X射线荧光光谱法测定PM2.5中23种无机元素的测定方法,优化了测试条件,测量一个样品耗时约15 min,计算了各元素的方法检出限。对NIST SRM 2783滤膜标准品在一周内重复测定10次来计算方法的准确度与精密度,测定结果显示大多数元素的测量值在给出的参考值范围内,且测量标准偏差一般在10%以内。对比了石英与聚四氟乙烯材质(Teflon)滤膜的空白值,石英滤膜中Si、Fe、Na、Mg、Al、K、Ca等元素的背景值较高,Teflon滤膜的背景值较低,推荐选用Teflon滤膜作为PM2.5组分分析采样滤膜。分别用波长色散-X射线荧光光谱法及酸消解-ICP-MS法测定了样品膜中的元素组分,得到的测定结果基本一致。  相似文献   
10.
对3类适用于酚类物质的衍生方法进行比较。结果显示,3种衍生方法均具有改善峰形、提高检测灵敏度、降低检出限等优势。其中七氟丁酸酐衍生法具有较大的腐蚀性;TMS衍生体系对水分非常敏感,需确保衍生体系脱水充分;五氟苄基溴衍生相对更成熟和完善。  相似文献   
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