Application of integrated micro sensor in internal measurement of high temperature fuel cell

This study developed an integrated (flow, voltage, and temperature) micro sensor using the micro-electro-mechanical systems (MEMS) technology. It was inserted into the high temperature proton exchange membrane fuel cell (HT-PEMFC) for local real-time measurement. The integrated micro sensor is made of 40 µm thick stainless steel base material, and its protective layer is formed by polyimide (PI) that has better temperature resistance. The integrated micro sensor has three functions, and is favorably characterized by small size, good acid resistance and temperature resistance, quick response, real-time measurement, and being able to be put in any place for measurement. After calibration, and its reliability confirmed, the integrated micro sensor is inserted into the HT-PEMFC for local microcosmic measurement.