用于微电子废水预处理的过滤式阴极电芬顿工艺中试

以钢丝网膜组件为阴极构建了过滤式阴极电芬顿工艺,针对微电子废水再生回用预处理开展中试研究。考察了过滤式阴极电芬顿工艺有机物处理潜能,研究了曝气/不曝气、外加电压、Fe2+投加量等运行参数对污染物去除效果及运行费用的影响,在最优工况下开展了连续流中试,并与传统芬顿工艺进行对比。结果表明:过滤式阴极电芬顿工艺能够稳定产生·OH,具备难降解有机物处理潜能。在HRT=120 min条件下,过滤式阴极电芬顿工艺最佳运行工况为:曝气量0.6 m3/h,外加电压3 V,Fe2+投加量0.3 mmol/L。在该工况下处理微电子废水COD、TOC、H₂O₂去除率分别为(73.6±18.3)%、(51.2±12.7)%和(83.7±13.0)%,单位COD处理费用为1.93 元/g COD,有机物去除效果和运行费用较传统芬顿具有显著优势。

PILOT-SCALE STUDY ON MEMBRANE-CATHODE ELECTRO-FENTON PROCESS FOR PRETREATMENT OF SEMICONDUCTOR WASTEWATER

A membrane-cathode electro-Fenton process based on cathodic steel mesh membrane module was established and pilot-scale for the pretreatment of semiconductor wastewater reuse was conducted. The organic matters’ removal efficiency was investigated, and the operation parameters (including aeration, applied voltage and Fe2+ dosage) were also optimized. The continuous-flow pilot-scale experiment was carried out under optimal conditions and then compared with Fenton process. The results showed that the membrane-cathode electro-Fenton process could continuously produce ·OH exhibiting high potential in eliminating refractory organic compounds. Under HRT=120 min, the optimal operation parameters were found to be 0.6 m3/h of air flux, 3 V of applied voltage and 0.3 mmol/L of Fe2+ dosage, with removal rates of COD, TOC and H₂O₂ at (73.6±18.3)%, (51.2±12.7)% and (83.7±13.0)%, respectively. The corresponding treatment cost per unit COD was RMB 1.93/g COD. In conclusion, the membrane-cathode electro-Fenton process showed higher organic removal rate and lower cost, cimparing to the Fenton process.