| 基于二维材料的真空气压传感器设计与测试 |
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| 引用本文： | 王浩志.基于二维材料的真空气压传感器设计与测试[J].安全．健康和环境,2021,21(1):23-28. |
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| 作者姓名： | 王浩志 |
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| 作者单位： | 中国石化青岛安全工程研究院,山东青岛 266104 |
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| 摘 要： | 设计、加工、测试了一种基于二维材料(MoS2)的小型化、微机电系统(MEMS)皮拉尼气压传感器,测试结果表明传感器有效测量范围10~10^4 Pa,最高灵敏度50Ω/Pa,功耗6×10^-7 W/V,与仿真结果相符。该传感器具有体积小、功耗低、灵敏度高等优点,在复杂环境下真空压力测量领域中具有广阔的应用前景。
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| 关 键 词： | 真空传感 二维材料 二硫化钼 皮拉尼气压传感器 微机电系统 |
Design and Test of Vacuum Pressure Sensor based on Two Dimensional Material |
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| Wang Haozhi.Design and Test of Vacuum Pressure Sensor based on Two Dimensional Material[J].Safety Environment Health,2021,21(1):23-28. |
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| Authors: | Wang Haozhi |
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| Institution: | (SINOPEC Qingdao Research Institute of Safety Engineering,Shandong,Qingdao,266104) |
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| Abstract: | A miniaturized pirani pressure sensor based on two-dimensional material(MoS 2)and mirco electro mechanical system(MEMS)was designed,fabricated and tested.The test results showed that thee effective measurement range of the sensor was 10~104 Pa,the maximum sensitivity was 50Ω/Pa,and the power consumption was 6×10^-7 W/V,which was consistent with the simulation results.The sensor has the advantages of small volume,low power consumption and high sensitivity,which has a broad application prospect in the field of vacuum pressure measurement in complex environment. |
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| Keywords: | vacuum sensing two dimensional materials MoS 2 pirani gauge MEMS |
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