Emergency response study for chemical releases in the high-tech industry in Taiwan—A semiconductor plant example |
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| Authors: | CP Lin HK Chang YM Chang SW Chen CM Shu |
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| Institution: | 1. Doctoral Program, Graduate School of Engineering Science and Technology, National Yunlin University of Science and Technology (NYUST), 123, University Rd., Sec. 3, Douliou, Yunlin 64002, Taiwan, ROC;2. Process Safety and Disaster Prevention Laboratory, Department of Safety, Health, and Environmental Engineering, NYUST, 123, University Rd., Sec. 3, Douliou, Yunlin 64002, Taiwan, ROC;3. Environmental Protection Administration, Executive Yuan, 83, Sec. 1, Jhonghua Rd., Taipei 10042, Taiwan, ROC;1. School of Civil and Environmental Engineering, University of Science and Technology Beijing, Beijing 100083, China;2. Chinese Academy of Governance, Beijing 100089, China;3. Institute of Public Safety, China Academy of Safety Science and Technology, Beijing 100012, China;1. Institute of Measurement and Electronic Technology, Department of Automation, Tsinghua University, Beijing, 100084, China;2. University Paris-Est, Laboratoire Modelisation et Simulation Multi Echelle, MSME (UMR 8208 CNRS), 5 Bd Descartes, Bat. Lavoisier, 77454, Marne-la-Vallee Cedex 2, France;3. Jiangsu Key Laboratory of Hazardous Chemicals Safety and Control, College of Safety Science and Engineering, Nanjing Tech University, Nanjing, 210009, China;1. School of Electromechanical Engineering, Guangdong University of Technology, Guangzhou, 510006, China;2. Faculty of Technology, Policy and Management, Safety and Security Science Group (S3G), TU Delft, 2628 BX, Delft, The Netherlands;3. Faculty of Applied Economics, Antwerp Research Group on Safety and Security (ARGoSS), Universiteit Antwerpen, 2000, Antwerp, Belgium;4. CEDON, KULeuven, 1000, Brussels, Belgium |
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| Abstract: | In the past two decades, there has been continuous investment and expansion of semiconductor, photoelectric panel, or solar cell plants in the high-tech industry. For example, establishing a semiconductor plant costs about US$ 3 billion. In addition, the output value of integrated circuits (IC) of Taiwan as a whole is estimated to be about US$ 5.215 billion, and globally of US$ 275.2 billion in 2008. A large amount and a variety of specialty gases or chemicals are applied during processes in high-tech facilities and these chemicals are characterized by inflammability, toxicity, and corrosiveness. Accidents may result once errors or leaks occur in any part of the supply chain, which consists of storage facilities, supply equipment, process machines, and tail gas elimination devices. Personnel casualties can result in serious situations. This study discusses the emergency response procedures and common response defects in semiconductor plants with a view to enhancing emergency response effects and capabilities, avoiding casualties, reducing property loss and shortening operation interruption. |
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