|
|||||
|
|
| Control of arsenic Pollution from waste gases during fabrication of semiconductor | |
| 作者姓名： | Wen Ruimei Liang Junwu Deng Lisheng Peng Yongqing |
| 作者单位： | Institute of Semiconductors，Chinese Academy of Sciences Beijing 100083，China |
| 摘 要： | ＣｏｎｔｒｏｌｏｆａｒｓｅｎｉｃＰｏｌｌｕｔｉｏｎｆｒｏｍｗａｓｔｅｇａｓｅｓｄｕｒｉｎｇｆａｂｒｉｃａｔｉｏｎｏｆｓｅｍｉｃｏｎｄｕｃｔｏｒＷｅｎＲｕｉｍｅｉ；ＬｉａｎｇＪｕｎｗｕ；ＤｅｎｇＬｉｓｈｅｎｇ；ＰｅｎｇＹｏｎｇｑｉｎｇ（Ｉｎｓｔｉｔｕｔ... |
| 关 键 词： | Semiconductoro arsenic pollution abatement. |
| 收稿时间： | 1993/7/21 0:00:00 |
Control of arsenic Pollution from waste gases during fabrication of semiconductor |
|
| Wen Ruimei,Liang Junwu,Deng Lisheng,Peng Yongqing.Control of arsenic Pollution from waste gases during fabrication of semiconductor[J].Journal of Environmental Sciences,1994,6(1):123-127. | |
| Authors: | Wen Ruimei Liang Junwu Deng Lisheng Peng Yongqing |
| Abstract: | The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied. |
| Keywords: | Semiconductoro arsenic pollution abatement |
| 本文献已被 CNKI 等数据库收录！ | |
| 点击此处可从《环境科学学报(英文版)》浏览原始摘要信息 | |
| 点击此处可从《环境科学学报(英文版)》下载免费的PDF全文 | |