| Control of arsenic Pollution from waste gases during fabrication of semiconductor |
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| 引用本文： | Wen Ruimei,Liang Junwu,Deng Lisheng,Peng Yongqing. Control of arsenic Pollution from waste gases during fabrication of semiconductor[J]. 环境科学学报(英文版), 1994, 6(1): 123-127 |
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| 作者姓名： | Wen Ruimei Liang Junwu Deng Lisheng Peng Yongqing |
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| 作者单位： | Institute of Semiconductors，Chinese Academy of Sciences Beijing 100083，China |
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| 摘 要： | ＣｏｎｔｒｏｌｏｆａｒｓｅｎｉｃＰｏｌｌｕｔｉｏｎｆｒｏｍｗａｓｔｅｇａｓｅｓｄｕｒｉｎｇｆａｂｒｉｃａｔｉｏｎｏｆｓｅｍｉｃｏｎｄｕｃｔｏｒＷｅｎＲｕｉｍｅｉ；ＬｉａｎｇＪｕｎｗｕ；ＤｅｎｇＬｉｓｈｅｎｇ；ＰｅｎｇＹｏｎｇｑｉｎｇ（Ｉｎｓｔｉｔｕｔ...
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| 关 键 词： | Semiconductoro arsenic pollution abatement. |
| 收稿时间： | 1993-07-21 |
Control of arsenic Pollution from waste gases during fabrication of semiconductor |
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| Wen Ruimei, Liang Junwu, Deng Lisheng, Peng Yongqing. Control of arsenic Pollution from waste gases during fabrication of semiconductor[J]. Journal of environmental sciences (China), 1994, 6(1): 123-127 |
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| Authors: | Wen Ruimei Liang Junwu Deng Lisheng Peng Yongqing |
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| Abstract: | The abatement technology of toxic arsenic pollution during fabrication of semiconductormaterials and devices has been studied. |
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| Keywords: | Semiconductoro arsenic pollution abatement. |
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