微波等离子体技术及研究进展

从微波等离子体发生及应用研究两个方面综述微波等离子体技术及研究进展,先从微波激励气体放电工作原理及能量传递方式两方面介绍微波等离子体技术,在此基础上,结合实验结果及现有研究成果对微波等离子体的发射光谱特性及温度特性进行论述。在微波等离子体应用研究方面,归纳总结了电子回旋共振微波等离子体、表面波等离子体、谐振腔微波等离子体等几种典型的微波等离子体技术及其特点,结合在薄膜沉积、废气处理、微量元素检测等方面的应用研究现状,对微波等离子体技术存在的问题及发展趋势进行了分析和展望。

Microwave Plasma Technology and Research Progress

The introduction and research process of microwave plasma technology was reviewed from two aspects of microwave plasma generation and application research. Firstly,the microwave plasma technology was introduced by describing the working principle and energy transfer mode of gas discharge excited by microwave. The emission spectral characteristics and temperature characteristics of microwave plasma were discussed based on the experimental results and existing research. Several typical technologies such as electron cyclotron resonance microwave plasma,surface microwave plasma,and cavity microwave plasma and their technical characteristics were summarized from the aspect of application research. Based on the application research status in thin film deposition,gas disposal,the trace element detection and other aspects,the existing problems and development trend of microwave plasma technology were analyzed and prospected.