| 大功率半导体器件生产线的酸雾净化系统设计 |
| |
| 引用本文： | 李杨. 大功率半导体器件生产线的酸雾净化系统设计[J]. 环境工程, 2010, 28(1): 70-72. DOI: 10.13205/j.hjgc.201001022 |
| |
| 作者姓名： | 李杨 |
| |
| 作者单位： | 株洲南车时代电气公司,湖南,株洲,412001 |
| |
| 摘 要： | 介绍了大功率半导体器件生产线的酸雾净化系统设计,该系统可靠性高,结构合理,实现了对酸碱废气的净化处理,为类似工程的设计提供了参考。
|
| 关 键 词： | 酸雾净化系统 设计 净化吸收塔 |
DESIGN OF ACID MIST PURIFYING SYSTEM FOR PRODUCTION LINE OF HIGH POWER SEMICONDUCTOR DEVICES |
| |
| Li Yang. DESIGN OF ACID MIST PURIFYING SYSTEM FOR PRODUCTION LINE OF HIGH POWER SEMICONDUCTOR DEVICES[J]. Environmental Engineering, 2010, 28(1): 70-72. DOI: 10.13205/j.hjgc.201001022 |
| |
| Authors: | Li Yang |
| |
| Affiliation: | Zhuzhou CSR Times Electric Co.;Ltd;Zhuzhou 412001;China |
| |
| Abstract: | This article introduced mostly the design of the acid mist decontaminating system for the production line a high power semiconductor devices.The system has high reliability and reasonable configuration and could be used to clean the acid and alkali exhaust gases.Which may be a reference for similar project's decontaminating system design. |
| |
| Keywords: | acid mist decontaminating system design decontaminating absorbing tower |
| 本文献已被 CNKI 万方数据 等数据库收录！ |
| 点击此处可从《环境工程》浏览原始摘要信息 |
|
点击此处可从《环境工程》下载全文 |
|
